TY - GEN
T1 - Hybrid Variable Capacitor in Impedance Matcher for RF Plasma Process
AU - Min, Juhwa
AU - Suh, Yongsug
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/5/24
Y1 - 2021/5/24
N2 - This paper introduces a novel method to reduce the capacitance variable time by Hybrid Variable Capacitor (hereinafter referred to as HVC) circuit applied in impedance matching circuit of Radio Frequency (hereinafter referred to as RF) plasma system. Until recently, the impedance matcher mainly used a mechanically Vacuum Variable Capacitor (hereinafter referred to as VVC). However, since the capacitance is changed mechanically, a significant portion of the process time is consumed in the matching time. Therefore, in recent years, in order to reduce the matching time, an Electrical Variable Capacitor (hereinafter referred to as EVC) that electrically variable capacitance has been developed using power electronics technology. However, EVC has a problem in that it is bulky and has a small capacitance resolution. Therefore, this paper proposes an HVC, a variable capacitor with a new structure, by combining the advantages of VVC and EVC.
AB - This paper introduces a novel method to reduce the capacitance variable time by Hybrid Variable Capacitor (hereinafter referred to as HVC) circuit applied in impedance matching circuit of Radio Frequency (hereinafter referred to as RF) plasma system. Until recently, the impedance matcher mainly used a mechanically Vacuum Variable Capacitor (hereinafter referred to as VVC). However, since the capacitance is changed mechanically, a significant portion of the process time is consumed in the matching time. Therefore, in recent years, in order to reduce the matching time, an Electrical Variable Capacitor (hereinafter referred to as EVC) that electrically variable capacitance has been developed using power electronics technology. However, EVC has a problem in that it is bulky and has a small capacitance resolution. Therefore, this paper proposes an HVC, a variable capacitor with a new structure, by combining the advantages of VVC and EVC.
KW - electrical variable capacitor
KW - impedance matcher
KW - RF plasma system
KW - vacuum variable capacitor
UR - https://www.scopus.com/pages/publications/85114206802
U2 - 10.1109/ECCE-Asia49820.2021.9479452
DO - 10.1109/ECCE-Asia49820.2021.9479452
M3 - Conference paper
AN - SCOPUS:85114206802
T3 - Proceedings of the Energy Conversion Congress and Exposition - Asia, ECCE Asia 2021
SP - 2410
EP - 2414
BT - Proceedings of the Energy Conversion Congress and Exposition - Asia, ECCE Asia 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th IEEE Energy Conversion Congress and Exposition - Asia, ECCE Asia 2021
Y2 - 24 May 2021 through 27 May 2021
ER -