Hydrodechlorination of silicon tetrachloride to trichlorosilane over ordered mesoporous carbon catalysts: Effect of pretreatment of oxygen and hydrochloric acid

This paper reports on the catalytic reaction for the conversion of silicon tetrachloride (STC) to trichlorosilane (TCS) over pretreated ordered mesoporous carbon (OMC) catalysts by oxygen (denoted as OMC-O₂) and hydrochloric acid (denoted as OMC-HCl) at 300 °C under N2 atmosphere. The OMC-O₂ shows significantly improved the surface area (1341.2 m²/g) and pore volume (1.65 cm3/g), which resulted in the highest conversion rate of 7.3% as compared to bare OMC (4.3%) and OMC-HCl (5.7%). It is found that the conversion rate of STC to TCS is proportional to the number of Si-O bond over OMC catalysts, which suggests that Si-O-C bond formation is crucial to the reaction as active sites. The O₂ pretreatment seems to promote the generation of oxygenated species for the formation of Si-O-C.