Impact of humidity on long-term stability of HfS2 grown on sapphire substrate by chemical vapor deposition and strategies to prevent native oxidation

Kwangwook Park

Impact of humidity on long-term stability of HfS2 grown on sapphire substrate by chemical vapor deposition and strategies to prevent native oxidation

Kwangwook Park

Electronic Materials Engineering

Research output: Contribution to journal › Journal article › peer-review

Original language	Korean
Journal	Materials Science in Semiconductor Processing
State	Published - 2025.06.15

Cite this

@article{eda37e19218044b286dbbfa3ccbcb112,

title = "Impact of humidity on long-term stability of HfS2 grown on sapphire substrate by chemical vapor deposition and strategies to prevent native oxidation",

author = "Kwangwook Park",

year = "2025",

month = jun,

day = "15",

language = "Korean",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

}