Inclined-wall regular micro-pillar-arrayed surfaces covered entirely with an alumina nanowire forest and their improved superhydrophobicity

This paper reports a multiple-scale hierarchically structured superhydrophobic surface that is composed of inclined-wall regular micro-pillar arrays covered entirely with an alumina nanowire forest (ANF) to improve the surface wettability. The multiple-scaled structures were fabricated stably using a simple batch process based on an anisotropic chemical silicon etching process and a subsequent time-controlled anodic aluminum oxide technique. The surface wetting properties of the mono-roughened surfaces with inclined-wall micro-pillar arrays, which are normally in the Wenzel wetting regime, could be transitioned perfectly to the slippery Cassie mode and enhanced greatly in the Wenzel regime in cases of a high- and low-density of the micro-pillars, respectively, by easily amplifying the intrinsic contact angle through the entire coverage of the ANF on the micro-roughened surfaces. The wettability of the proposed multiple-scaled surfaces could also be predicted using analytic surface models and the experimental results agreed greatly with the wetting trends estimated theoretically due to the geometrical regularity of the base micro-structures.