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Influence of thermal annealing on initial Zn layers and the properties of ZnO thin films grown by PA-MBE

  • M. Y. Cho*
  • , H. G. Kim
  • , S. M. Jeon
  • , G. S. Kim
  • , H. Y. Choi
  • , K. G. Yim
  • , M. S. Kim
  • , D. Y. Lee
  • , J. S. Kim
  • , J. S. Kim
  • , G. S. Eom
  • , J. I. Lee
  • , J. Y. Leem
  • *Corresponding author for this work
  • Inje University
  • Samsung
  • Yeungnam University
  • ALPHAPLUS Co., Ltd.
  • Korea Research Institute of Standards and Science

Research output: Contribution to conferenceConference paperpeer-review

Abstract

ZnO thin films were grown on p-type Si (100) by plasma-assisted molecular beam epitaxy (PA-MBE). Before the growth of the ZnO thin films, the initial Zn layers were deposited on the Si substrates. In order to investigate the effects of thermal annealing, the initial Zn layers were annealed at the temperature range from 500 to 700°C for 30 min under oxygen ambient. The properties of the ZnO thin films with annealed initial Zn layers have been investigated by X-ray diffraction (XRD), room temperature (RT) photoluminescence (PL), and scanning electron microscopy (SEM).

Original languageEnglish
Title of host publicationPhysics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30
Pages165-166
Number of pages2
DOIs
StatePublished - 2011
Event30th International Conference on the Physics of Semiconductors, ICPS-30 - Seoul, Korea, Republic of
Duration: 2010.07.252010.07.30

Publication series

NameAIP Conference Proceedings
Volume1399
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference30th International Conference on the Physics of Semiconductors, ICPS-30
Country/TerritoryKorea, Republic of
CitySeoul
Period10.07.2510.07.30

Keywords

  • Molecular beam epitaxy
  • Photoluminescence
  • Scanning electron microscopy
  • Zinc oxide

Quacquarelli Symonds(QS) Subject Topics

  • Physics & Astronomy

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