Intense Pulsed Light Annealing for High-k Capacitor Integration in 1T-1C DRAM with a-IGZO Cell Transistors
- Heetae Kim
- , Seohak Park
- , Johak Jeong
- , Jihoon Jeon
- , Hoseok Lee
- , Chihun Sung
- , Jeho Na
- , Min Ju Kim
- , Seong Keun Kim
- , Sung Yool Choi
- , Keun Heo
- , Sung Haeng Cho
- , Byung Jin Cho*
*Corresponding author for this work
- Korea Advanced Institute of Science and Technology
- Jeonbuk National University
- Korea University
- Korea Institute of Science and Technology
- Electronics and Telecommunications Research Institute
- Dankook University
Research output: Contribution to journal › Journal article › peer-review
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