Interferometric snapshot spectro-ellipsometry

Vamara Dembele; Moonseob Jin; Inho Choi; Won Chegal; Daesuk Kim

doi:10.1364/OE.26.001333

Interferometric snapshot spectro-ellipsometry

Vamara Dembele
, Moonseob Jin
, Inho Choi
, Won Chegal
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

Jeonbuk National University
Korea Research Institute of Standards and Science

Research output: Contribution to journal › Journal article › peer-review

15 Scopus citations

Abstract

We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.

Original language	English
Pages (from-to)	1333-1341
Number of pages	9
Journal	Optics Express
Volume	26
Issue number	2
DOIs	https://doi.org/10.1364/OE.26.001333
State	Published - 2018.01.22

Quacquarelli Symonds(QS) Subject Topics

Physics & Astronomy

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10.1364/OE.26.001333

Cite this

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title = "Interferometric snapshot spectro-ellipsometry",

abstract = "We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.",

author = "Vamara Dembele and Moonseob Jin and Inho Choi and Won Chegal and Daesuk Kim",

note = "Publisher Copyright: {\textcopyright} 2018 Optical Society of America.",

year = "2018",

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AU - Dembele, Vamara

AU - Jin, Moonseob

AU - Choi, Inho

AU - Chegal, Won

AU - Kim, Daesuk

PY - 2018/1/22

Y1 - 2018/1/22

N2 - We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.

AB - We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.

UR - https://www.scopus.com/pages/publications/85040914619

U2 - 10.1364/OE.26.001333

DO - 10.1364/OE.26.001333

M3 - Journal article

C2 - 29402008

AN - SCOPUS:85040914619

SN - 1094-4087

VL - 26

SP - 1333

EP - 1341

JO - Optics Express

JF - Optics Express

IS - 2

ER -

Interferometric snapshot spectro-ellipsometry

Abstract

Quacquarelli Symonds(QS) Subject Topics

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