@inproceedings{052aa638346b4a0abd9b52ce8c33b287,
title = "Investigating the performance of RF MEMS switches",
abstract = "The performance of Micro-Electro-Mechanical System (MEMS) metal switches were investigated at wide temperature range. Measurements were carried out using cryogenic probe station and S-parameters were taken using a network analyser for frequencies up to 20 GHz. A total of 28 switches were evaluated. The investigation shows a 50\% increase in the actuation voltage and a decrease in the percentage of operational switches as the temperature was reduced to 10 K. At room temperature the best isolation (when open) was 30 dB at 10 GHz with an insertion loss of 0.14 dB (when closed). Measurement accuracy was reduced at low temperature, however, isolations and insertion losses were similar to room temperature values.",
keywords = "Actuation voltage, Low temperatures, Metal switch, Reliability, RF MEMS",
author = "Su, \{Hieng Tiong\} and Ignacio Llamas-Garro and Lancaster, \{Michael J.\} and Martin Prest and Park, \{Jae Hyoung\} and Kim, \{Jung Mu\} and Baek, \{Chang Wook\} and Kim, \{Yong Kweon\}",
year = "2006",
doi = "10.1109/SMELEC.2006.381061",
language = "English",
isbn = "0780397312",
series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",
pages = "263--266",
booktitle = "ICSE 2006",
note = "2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 ; Conference date: 29-11-2006 Through 01-12-2006",
}