Investigation of microstructural and electrical properties of self-aligned Ni-InGaAsalloy contacts to InGaAs as a function of rapid thermal annealing temperature

Kyu-Hwan Shim

Investigation of microstructural and electrical properties of self-aligned Ni-InGaAsalloy contacts to InGaAs as a function of rapid thermal annealing temperature

Kyu-Hwan Shim

Department of Semiconductor Science and Technology

Research output: Contribution to journal › Journal article › peer-review

Original language	Korean
Journal	Journal of Ceramic Processing Research
State	Published - 2020.04.24

Cite this

@article{1101b43f37bc4a5e93279c291576dbe9,

title = "Investigation of microstructural and electrical properties of self-aligned Ni-InGaAsalloy contacts to InGaAs as a function of rapid thermal annealing temperature",

author = "Kyu-Hwan Shim",

year = "2020",

month = apr,

day = "24",

language = "Korean",

journal = "Journal of Ceramic Processing Research",

issn = "1229-9162",

}