@inproceedings{0c441dcc365a4d19894d4855fa208a33,
title = "Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer",
abstract = "We describe a novel dynamic spectroscopic ellipsometer and its advanced imaging spectro-ellipsometric scheme based on one-piece polarizing interferometric module. The proposed dynamic spectroscopic ellipsometer requires neither moving parts nor time dependent polarization modulation for extracting spectroscopic ellipsometric parameters. By employing a snapshot single spectral data, we reconstruct spatially resolved spectral ellipsometric information of ultrathin films coated on a freeform surface with high precision and accuracy. The dynamic measurement capability of the proposed imaging spectro-ellipsometer is demonstrated for large-scale periodic nano-patterns fabricated on roll surface.",
keywords = "Dynamic, Large-Scale, Spectroscopic ellipsometry, Uniformity evaluation",
author = "Daesuk Kim and Vamara Dembele",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; Optifab 2019 ; Conference date: 14-10-2019 Through 17-10-2019",
year = "2019",
doi = "10.1117/12.2536978",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Unger, \{Blair L.\} and Nelson, \{Jessica DeGroote\}",
booktitle = "Optifab 2019",
}