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Local structure and conduction mechanism in amorphous In-Ga-Zn-O films

  • Deok Yong Cho*
  • , Jaewon Song
  • , Kwang Duk Na
  • , Cheol Seong Hwang
  • , Jong Han Jeong
  • , Jae Kyeong Jeong
  • , Yeon Gon Mo
  • *Corresponding author for this work
  • Seoul National University
  • Samsung
  • Inha University

Research output: Contribution to journalJournal articlepeer-review

Abstract

The local structures of amorphous In-Ga-Zn-O (InGaZnO4 and In2 Ga2 ZnO7) films were examined by x-ray absorption spectroscopy and fine structure analysis. The local metal-oxygen coordination in both films indicated bipyramidal GaO5, ZnO 5, and trigonal InO6 clusters. Further analyses showed splitting of the Zn-O bond length suggesting distortion of the ZnO5 cluster, which evidenced the existence of localized holes in the Zn atoms. In combination with the abundance of In 5s electrons, this shows that the In-Zn hopping interactions contribute to electrical conduction.

Original languageEnglish
Article number112112
JournalApplied Physics Letters
Volume94
Issue number11
DOIs
StatePublished - 2009

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