Low loss K-band tunable bandpass filter using micromachined variable capacitors

Jong Man Kim; Sanghyo Lee; Jae Hyoung Park; Jung Mu Kim; Chang Wook Baek; Youngwoo Kwon; Yong Kweon Kim

Low loss K-band tunable bandpass filter using micromachined variable capacitors

Jong Man Kim^*
, Sanghyo Lee
, Jae Hyoung Park
, Jung Mu Kim^*
, Chang Wook Baek
, Youngwoo Kwon
, Yong Kweon Kim

^*Corresponding author for this work

Division of Electronic Engineering

Seoul National University
LG Corporation
Chung-Ang University

Research output: Contribution to conference › Conference paper › peer-review

7 Scopus citations

Abstract

In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performances have been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm × 1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In analog operating region of the capacitor, center frequency could be tuned from 20.7 to 18 GHz, which means the tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With the bias voltage of 60 V, the membrane was collapse to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1071-1074
Number of pages	4
State	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005.06.5 → 2005.06.9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05.06.5 → 05.06.9

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

K-band tunable filter
Low insertion loss
MEMS variable capacitor
Shunt-type resonator

Cite this

Kim, J. M., Lee, S., Park, J. H., Kim, J. M., Baek, C. W., Kwon, Y., & Kim, Y. K. (2005). Low loss K-band tunable bandpass filter using micromachined variable capacitors. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1071-1074). Article 2E4.154 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Kim, Jong Man ; Lee, Sanghyo ; Park, Jae Hyoung et al. / Low loss K-band tunable bandpass filter using micromachined variable capacitors. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1071-1074 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

@inproceedings{8728828a088a4a33989aba0e83aabadb,

title = "Low loss K-band tunable bandpass filter using micromachined variable capacitors",

abstract = "In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performances have been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm × 1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In analog operating region of the capacitor, center frequency could be tuned from 20.7 to 18 GHz, which means the tuning-ratio of 13\%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With the bias voltage of 60 V, the membrane was collapse to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25\%. In this case, the capacitance ratio was calculated to be 1.9.",

keywords = "K-band tunable filter, Low insertion loss, MEMS variable capacitor, Shunt-type resonator",

author = "Kim, \{Jong Man\} and Sanghyo Lee and Park, \{Jae Hyoung\} and Kim, \{Jung Mu\} and Baek, \{Chang Wook\} and Youngwoo Kwon and Kim, \{Yong Kweon\}",

year = "2005",

language = "English",

isbn = "0780389948",

series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

pages = "1071--1074",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Kim, JM, Lee, S, Park, JH, Kim, JM, Baek, CW, Kwon, Y & Kim, YK 2005, Low loss K-band tunable bandpass filter using micromachined variable capacitors. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 2E4.154, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 1071-1074, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05.06.5.

Low loss K-band tunable bandpass filter using micromachined variable capacitors. / Kim, Jong Man; Lee, Sanghyo; Park, Jae Hyoung et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1071-1074 2E4.154 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Contribution to conference › Conference paper › peer-review

TY - GEN

T1 - Low loss K-band tunable bandpass filter using micromachined variable capacitors

AU - Kim, Jong Man

AU - Lee, Sanghyo

AU - Park, Jae Hyoung

AU - Kim, Jung Mu

AU - Baek, Chang Wook

AU - Kwon, Youngwoo

AU - Kim, Yong Kweon

PY - 2005

Y1 - 2005

N2 - In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performances have been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm × 1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In analog operating region of the capacitor, center frequency could be tuned from 20.7 to 18 GHz, which means the tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With the bias voltage of 60 V, the membrane was collapse to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.

AB - In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performances have been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm × 1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In analog operating region of the capacitor, center frequency could be tuned from 20.7 to 18 GHz, which means the tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With the bias voltage of 60 V, the membrane was collapse to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.

KW - K-band tunable filter

KW - Low insertion loss

KW - MEMS variable capacitor

KW - Shunt-type resonator

UR - https://www.scopus.com/pages/publications/27544506619

M3 - Conference paper

AN - SCOPUS:27544506619

SN - 0780389948

T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

SP - 1071

EP - 1074

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Kim JM, Lee S, Park JH, Kim JM, Baek CW, Kwon Y et al. Low loss K-band tunable bandpass filter using micromachined variable capacitors. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1071-1074. 2E4.154. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

Low loss K-band tunable bandpass filter using micromachined variable capacitors

Abstract

Publication series

Conference

UN SDGs

Keywords

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