Measurement of excitation temperature on a microwave induced atmospheric plasma

S. Y. Moon; S. Park; G. S. Eom; J. Kim; Y. Im; W. Choe; J. J. Choi; Y. S. Hwang; K. H. Paek

doi:10.1109/PPPS.2001.961272

Measurement of excitation temperature on a microwave induced atmospheric plasma

S. Y. Moon
, S. Park
, G. S. Eom
, J. Kim
, Y. Im
, W. Choe
, J. J. Choi
, Y. S. Hwang
, K. H. Paek

Department of Quantum System Engineering

Korea Advanced Institute of Science and Technology
Kwangwoon University
Seoul National University

Research output: Contribution to journal › Journal article › peer-review

Abstract

Utilizing a 500 W, 2.45 GHz microwave system, an argon-assisted plasma was produced at atmospheric pressure. Stable generation of the plasma required optimized conditions such as appropriate quartz tube dimension, gas flow rate etc. Optical emission spectroscopy used for spectral line identification revealed the existence of oxygen radicals as well as argon ions and neutrals inside the plasma. Measurement of the excitation temperature was performed by using a Boltzmann plot. The result shows that it is a function of argon gas flow rate. It was also found that the plasma showed behavior as a recombining plasma due to cooling by the incoming cold argon gas.

Original language	English
Pages (from-to)	P4A06
Journal	IEEE International Conference on Plasma Science
DOIs	https://doi.org/10.1109/PPPS.2001.961272
State	Published - 2001
Event	28th IEEE International Conference on Plasma Science/ 13th IEEE International Pulsed Power Conference - Las Vegas, NV, United States Duration: 2001.06.17 → 2001.06.22

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10.1109/PPPS.2001.961272

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@article{aae5e49aeff34f758feddfbeb63348fd,

title = "Measurement of excitation temperature on a microwave induced atmospheric plasma",

abstract = "Utilizing a 500 W, 2.45 GHz microwave system, an argon-assisted plasma was produced at atmospheric pressure. Stable generation of the plasma required optimized conditions such as appropriate quartz tube dimension, gas flow rate etc. Optical emission spectroscopy used for spectral line identification revealed the existence of oxygen radicals as well as argon ions and neutrals inside the plasma. Measurement of the excitation temperature was performed by using a Boltzmann plot. The result shows that it is a function of argon gas flow rate. It was also found that the plasma showed behavior as a recombining plasma due to cooling by the incoming cold argon gas.",

author = "Moon, \{S. Y.\} and S. Park and Eom, \{G. S.\} and J. Kim and Y. Im and W. Choe and Choi, \{J. J.\} and Hwang, \{Y. S.\} and Paek, \{K. H.\}",

year = "2001",

doi = "10.1109/PPPS.2001.961272",

language = "English",

pages = "P4A06",

journal = "IEEE International Conference on Plasma Science",

issn = "0730-9244",

note = "28th IEEE International Conference on Plasma Science/ 13th IEEE International Pulsed Power Conference ; Conference date: 17-06-2001 Through 22-06-2001",

}

TY - JOUR

T1 - Measurement of excitation temperature on a microwave induced atmospheric plasma

AU - Moon, S. Y.

AU - Park, S.

AU - Eom, G. S.

AU - Kim, J.

AU - Im, Y.

AU - Choe, W.

AU - Choi, J. J.

AU - Hwang, Y. S.

AU - Paek, K. H.

PY - 2001

Y1 - 2001

N2 - Utilizing a 500 W, 2.45 GHz microwave system, an argon-assisted plasma was produced at atmospheric pressure. Stable generation of the plasma required optimized conditions such as appropriate quartz tube dimension, gas flow rate etc. Optical emission spectroscopy used for spectral line identification revealed the existence of oxygen radicals as well as argon ions and neutrals inside the plasma. Measurement of the excitation temperature was performed by using a Boltzmann plot. The result shows that it is a function of argon gas flow rate. It was also found that the plasma showed behavior as a recombining plasma due to cooling by the incoming cold argon gas.

AB - Utilizing a 500 W, 2.45 GHz microwave system, an argon-assisted plasma was produced at atmospheric pressure. Stable generation of the plasma required optimized conditions such as appropriate quartz tube dimension, gas flow rate etc. Optical emission spectroscopy used for spectral line identification revealed the existence of oxygen radicals as well as argon ions and neutrals inside the plasma. Measurement of the excitation temperature was performed by using a Boltzmann plot. The result shows that it is a function of argon gas flow rate. It was also found that the plasma showed behavior as a recombining plasma due to cooling by the incoming cold argon gas.

UR - https://www.scopus.com/pages/publications/85013582556

U2 - 10.1109/PPPS.2001.961272

DO - 10.1109/PPPS.2001.961272

M3 - Journal article

AN - SCOPUS:85013582556

SN - 0730-9244

SP - P4A06

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

T2 - 28th IEEE International Conference on Plasma Science/ 13th IEEE International Pulsed Power Conference

Y2 - 17 June 2001 through 22 June 2001

ER -

Measurement of excitation temperature on a microwave induced atmospheric plasma

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