Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Duksun Han; Hyo Chang Lee; Jin Young Bang; Chin Wook Chung; Se Youn Moon

doi:10.1016/j.cap.2015.06.018

Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Duksun Han
, Hyo Chang Lee
, Jin Young Bang
, Chin Wook Chung^*
, Se Youn Moon

^*Corresponding author for this work

Department of Quantum System Engineering

Research output: Contribution to journal › Journal article › peer-review

9 Scopus citations

Abstract

Spatial distributions of the effective electron temperature (T_eff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argon-helium mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density and plasma potential changed from a concave to a flat profile, and finally became a convex profile, while all spatial profiles of T_eff were hollow shapes with helium dilution in the argon discharge. This evolution of the plasma potential with helium gas could be explained by the increased energy relaxation length (λ_ε), indicating the transition of electron kinetics from local to non-local kinetics.

Original language	English
Pages (from-to)	1036-1041
Number of pages	6
Journal	Current Applied Physics
Volume	15
Issue number	9
DOIs	https://doi.org/10.1016/j.cap.2015.06.018
State	Published - 2015.07.13

Keywords

Electron energy distribution function
Electron heating mechanism
Ferrite core ICP
Inductively coupled plasma

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Physics & Astronomy

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10.1016/j.cap.2015.06.018

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@article{7278f060ef62479796b4b4d1ee6b9f74,

title = "Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas",

abstract = "Spatial distributions of the effective electron temperature (Teff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argon-helium mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density and plasma potential changed from a concave to a flat profile, and finally became a convex profile, while all spatial profiles of Teff were hollow shapes with helium dilution in the argon discharge. This evolution of the plasma potential with helium gas could be explained by the increased energy relaxation length (λε), indicating the transition of electron kinetics from local to non-local kinetics.",

keywords = "Electron energy distribution function, Electron heating mechanism, Ferrite core ICP, Inductively coupled plasma",

author = "Duksun Han and Lee, \{Hyo Chang\} and Bang, \{Jin Young\} and Chung, \{Chin Wook\} and Moon, \{Se Youn\}",

note = "Publisher Copyright: {\textcopyright} 2015 Published by Elsevier B.V.",

year = "2015",

month = jul,

day = "13",

doi = "10.1016/j.cap.2015.06.018",

language = "English",

volume = "15",

pages = "1036--1041",

journal = "Current Applied Physics",

issn = "1567-1739",

number = "9",

}

TY - JOUR

T1 - Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

AU - Han, Duksun

AU - Lee, Hyo Chang

AU - Bang, Jin Young

AU - Chung, Chin Wook

AU - Moon, Se Youn

PY - 2015/7/13

Y1 - 2015/7/13

N2 - Spatial distributions of the effective electron temperature (Teff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argon-helium mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density and plasma potential changed from a concave to a flat profile, and finally became a convex profile, while all spatial profiles of Teff were hollow shapes with helium dilution in the argon discharge. This evolution of the plasma potential with helium gas could be explained by the increased energy relaxation length (λε), indicating the transition of electron kinetics from local to non-local kinetics.

AB - Spatial distributions of the effective electron temperature (Teff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argon-helium mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density and plasma potential changed from a concave to a flat profile, and finally became a convex profile, while all spatial profiles of Teff were hollow shapes with helium dilution in the argon discharge. This evolution of the plasma potential with helium gas could be explained by the increased energy relaxation length (λε), indicating the transition of electron kinetics from local to non-local kinetics.

KW - Electron energy distribution function

KW - Electron heating mechanism

KW - Ferrite core ICP

KW - Inductively coupled plasma

UR - https://www.scopus.com/pages/publications/84936943076

U2 - 10.1016/j.cap.2015.06.018

DO - 10.1016/j.cap.2015.06.018

M3 - Journal article

AN - SCOPUS:84936943076

SN - 1567-1739

VL - 15

SP - 1036

EP - 1041

JO - Current Applied Physics

JF - Current Applied Physics

IS - 9

ER -

Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Abstract

Keywords

Quacquarelli Symonds(QS) Subject Topics

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