@inproceedings{4ca95c4ee83c40fd8f96335eb5994db7,
title = "Mechanically reliable MEMS variable capacitor using Single Crystalline Silicon (SCS) structure",
abstract = "In this paper, we firstly proposed a mechanically reliable parallel-plate type variable capacitor with a single crystalline silicon (SCS) supporting structure. The demonstrated variable capacitor was fabricated using an SiOG (Silicon-On-Glass) process, and both mechanical and electrical characteristics were measured. Total chip size was 1.05 mm × 0.72 mm, and the pull-in voltage was measured to be 37 V. With and without the applied DC bias, the measured S11 and S21 were changed from -15.6 dB to -5.1 dB, and from -0.49 dB to -2.3 dB at 30 GHz, respectively. The measured capacitance at the up and the down state were 30 fF and 140 fF, respectively. Therefore, the capacitance ratio is calculated to be 4.67.",
keywords = "Mechanical lifetime, Mechanical reliability, SCS RF MEMS variable capacitor, SiOG process",
author = "Kim, \{Jong Man\} and Sanghyo Lee and Kim, \{Jung Mu\} and Baek, \{Chang Wook\} and Youngwoo Kwon and Kim, \{Yong Kweon\}",
year = "2005",
language = "English",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "1080--1083",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}