Micro electrochemical milling

Bo Hyun Kim; Shi Hyoung Ryu; Deok Ki Choi; Chong Nam Chu

doi:10.1088/0960-1317/15/1/019

Micro electrochemical milling

Bo Hyun Kim^*
, Shi Hyoung Ryu
, Deok Ki Choi
, Chong Nam Chu

^*Corresponding author for this work

Department of Mechanical Engineering

Seoul National University
Gangneung-Wonju National University

Research output: Contribution to journal › Journal article › peer-review

258 Scopus citations

Abstract

In this paper, electrochemical machining (ECM) for fabricating micro structures is presented. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to an electrode. Using this method, 3D micro structures were machined on stainless steel. Good surface quality of the structures was obtained in the low concentration electrolyte, 0. 1 M H₂SO₄. In ECM, when the machining depth increases, structures taper. To reduce the taper, a disc-type electrode is introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 μm diameter were fabricated.

Original language	English
Pages (from-to)	124-129
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/15/1/019
State	Published - 2005.01

Quacquarelli Symonds(QS) Subject Topics

Engineering - Mechanical
Materials Science
Engineering - Electrical & Electronic
Engineering - Petroleum

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10.1088/0960-1317/15/1/019

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@article{9ba40e358a644eebbf2ac1e6bd23a3af,

title = "Micro electrochemical milling",

abstract = "In this paper, electrochemical machining (ECM) for fabricating micro structures is presented. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to an electrode. Using this method, 3D micro structures were machined on stainless steel. Good surface quality of the structures was obtained in the low concentration electrolyte, 0. 1 M H2SO4. In ECM, when the machining depth increases, structures taper. To reduce the taper, a disc-type electrode is introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 μm diameter were fabricated.",

author = "Kim, \{Bo Hyun\} and Ryu, \{Shi Hyoung\} and Choi, \{Deok Ki\} and Chu, \{Chong Nam\}",

year = "2005",

month = jan,

doi = "10.1088/0960-1317/15/1/019",

language = "English",

volume = "15",

pages = "124--129",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

number = "1",

}

TY - JOUR

T1 - Micro electrochemical milling

AU - Kim, Bo Hyun

AU - Ryu, Shi Hyoung

AU - Choi, Deok Ki

AU - Chu, Chong Nam

PY - 2005/1

Y1 - 2005/1

N2 - In this paper, electrochemical machining (ECM) for fabricating micro structures is presented. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to an electrode. Using this method, 3D micro structures were machined on stainless steel. Good surface quality of the structures was obtained in the low concentration electrolyte, 0. 1 M H2SO4. In ECM, when the machining depth increases, structures taper. To reduce the taper, a disc-type electrode is introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 μm diameter were fabricated.

AB - In this paper, electrochemical machining (ECM) for fabricating micro structures is presented. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to an electrode. Using this method, 3D micro structures were machined on stainless steel. Good surface quality of the structures was obtained in the low concentration electrolyte, 0. 1 M H2SO4. In ECM, when the machining depth increases, structures taper. To reduce the taper, a disc-type electrode is introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 μm diameter were fabricated.

UR - https://www.scopus.com/pages/publications/12344261616

U2 - 10.1088/0960-1317/15/1/019

DO - 10.1088/0960-1317/15/1/019

M3 - Journal article

AN - SCOPUS:12344261616

SN - 0960-1317

VL - 15

SP - 124

EP - 129

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

ER -

Micro electrochemical milling

Abstract

Quacquarelli Symonds(QS) Subject Topics

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