Microstructural and phase evolutions of Pt contact to N-type In0.53Ga0.47Asdriven by rapid thermal annealing and its correlation with specific contact resistivity

Kyu-Hwan Shim; Chel-Jong Choi

Microstructural and phase evolutions of Pt contact to N-type In0.53Ga0.47Asdriven by rapid thermal annealing and its correlation with specific contact resistivity

Department of Semiconductor Science and Technology

Research output: Contribution to journal › Journal article › peer-review

Original language	Korean
Journal	Intermetallics
State	Published - 2021.06.1

Cite this

@article{0b6813ee528d4a1288f8846487fc1489,

title = "Microstructural and phase evolutions of Pt contact to N-type In0.53Ga0.47Asdriven by rapid thermal annealing and its correlation with specific contact resistivity",

author = "Kyu-Hwan Shim and Chel-Jong Choi",

year = "2021",

month = jun,

day = "1",

language = "Korean",

journal = "Intermetallics",

issn = "0966-9795",

}