Abstract
Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.
| Original language | English |
|---|---|
| Pages (from-to) | 301-304 |
| Number of pages | 4 |
| Journal | Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals |
| Volume | 370 |
| DOIs | |
| State | Published - 2001 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 7 Affordable and Clean Energy
Keywords
- Dielectric constant
- Methylsilsesquioxane (MSSQ)
- Miscibility
- Nanoporosity
- Porogen
- Thin film
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