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Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

  • Byoung Suhk Kim*
  • , Dong Jun Lee
  • , Sung Kyu Min
  • , Young Jun Kim
  • , Soo Hyun Kim
  • , Do Yeung Yoon
  • , Hee Woo Rhee
  • *Corresponding author for this work
  • Sogang University
  • Electronics and Telecommunications Research Institute
  • Korea Institute of Science and Technology
  • Seoul National University

Research output: Contribution to journalJournal articlepeer-review

Abstract

Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

Original languageEnglish
Pages (from-to)301-304
Number of pages4
JournalMolecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Volume370
DOIs
StatePublished - 2001

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 7 - Affordable and Clean Energy
    SDG 7 Affordable and Clean Energy

Keywords

  • Dielectric constant
  • Methylsilsesquioxane (MSSQ)
  • Miscibility
  • Nanoporosity
  • Porogen
  • Thin film

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