@inproceedings{ca4b8a9a91e34e6695ec2c9ac3923c1c,
title = "Nano-scaled water ejection using nanopipette with QTF-AFM for nanolithography",
abstract = "We demonstrated that the apex of nanopipelle with applying electric field could be used as a nano-scaled water ejection system using AFM(Atomic Force Microscopy) System based on QTF(Quarlz Tunning Fork), namely nanolithography system. The tip diameter was 100∼1000 run which was fabricated by commercial pipette puller (P-2000) and electrode on the substrate was deposited by sputter deposition. With QTF-AFM feedback system, we could make the patterning on the substrate where we want. We could control the amount of water solution with applying electric field, tip diameter, distance between tip and substrate.",
keywords = "Nanolithography, Nanopipelle, QTF-AFM",
author = "An, \{S. M.\} and Jang, \{S. J.\} and Noh, \{H. E.\} and Jhe, \{W. H.\}",
year = "2009",
language = "English",
isbn = "9781439817827",
series = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009",
pages = "57--58",
booktitle = "Nanotechnology 2009",
note = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 ; Conference date: 03-05-2009 Through 07-05-2009",
}