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Nonferroelectric epitaxial Sr-Bi-Ta oxide thin film with a high dielectric constant

  • S. J. Hyun*
  • , B. H. Park
  • , S. D. Bu
  • , J. H. Jung
  • , T. W. Noh
  • *Corresponding author for this work
  • Seoul National University
  • LG Corporation

Research output: Contribution to journalJournal articlepeer-review

Abstract

Two kinds of epitaxial Sr-Bi-Ta oxides were grown on La0.5Sr0.5CoO3(001)/LaAlO3(001) substrates by pulsed laser deposition. At a temperature higher than 650°C, c-axis oriented SrBi2Ta2O9 films could be deposited epitaxially. At 550°C, an epitaxial film with a cubic fluorite-like phase could be grown. Although the film with the cubic phase does not show ferroelectric properties, it has good electrical properties which are suitable for high capacitance applications.

Original languageEnglish
Pages (from-to)2518-2520
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number17
DOIs
StatePublished - 1998

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