Novel applications of intense pulsed ion beams in materials science

K. Yatsui; W. Jiang; H. Suematsu; F. Endo; S. C. Yang

doi:10.1063/1.1530882

Novel applications of intense pulsed ion beams in materials science

K. Yatsui^*
, W. Jiang
, H. Suematsu
, F. Endo
, S. C. Yang

^*Corresponding author for this work

Department of Electrical Engineering

Nagaoka University of Technology

Research output: Contribution to conference › Conference paper › peer-review

Abstract

Using pulsed ion beam evaporation technique, experimental studies were carried out to embed metals into via holes in LSI. It will be shown that tungsten is successfully embedded in via holes with the aspect ratio of 4.3. Furthermore, light emission of blue has been observed from a poly silicon nanosize powders, which is also produced by pulsed ion beam evaporation technique.

Original language	English
Title of host publication	BEAMS 2002 - 14th International Conference on High-Power Particle Beams
Publisher	IEEE Computer Society
Pages	401-404
Number of pages	4
ISBN (Print)	9780735401075
DOIs	https://doi.org/10.1063/1.1530882
State	Published - 2002
Event	14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, United States Duration: 2002.06.23 → 2002.06.28

Publication series

Name	BEAMS 2002 - 14th International Conference on High-Power Particle Beams
Volume	1

Conference

Conference	14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002
Country/Territory	United States
City	Albuquerque, NM
Period	02.06.23 → 02.06.28

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10.1063/1.1530882

Cite this

Yatsui, K., Jiang, W., Suematsu, H., Endo, F., & Yang, S. C. (2002). Novel applications of intense pulsed ion beams in materials science. In BEAMS 2002 - 14th International Conference on High-Power Particle Beams (pp. 401-404). Article 6219473 (BEAMS 2002 - 14th International Conference on High-Power Particle Beams; Vol. 1). IEEE Computer Society. https://doi.org/10.1063/1.1530882

@inproceedings{51a6d4523c934cd995db8a8e55456289,

title = "Novel applications of intense pulsed ion beams in materials science",

abstract = "Using pulsed ion beam evaporation technique, experimental studies were carried out to embed metals into via holes in LSI. It will be shown that tungsten is successfully embedded in via holes with the aspect ratio of 4.3. Furthermore, light emission of blue has been observed from a poly silicon nanosize powders, which is also produced by pulsed ion beam evaporation technique.",

author = "K. Yatsui and W. Jiang and H. Suematsu and F. Endo and Yang, \{S. C.\}",

year = "2002",

doi = "10.1063/1.1530882",

language = "English",

isbn = "9780735401075",

series = "BEAMS 2002 - 14th International Conference on High-Power Particle Beams",

publisher = "IEEE Computer Society",

pages = "401--404",

booktitle = "BEAMS 2002 - 14th International Conference on High-Power Particle Beams",

note = "14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 ; Conference date: 23-06-2002 Through 28-06-2002",

}

Yatsui, K, Jiang, W, Suematsu, H, Endo, F & Yang, SC 2002, Novel applications of intense pulsed ion beams in materials science. in BEAMS 2002 - 14th International Conference on High-Power Particle Beams., 6219473, BEAMS 2002 - 14th International Conference on High-Power Particle Beams, vol. 1, IEEE Computer Society, pp. 401-404, 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002, Albuquerque, NM, United States, 02.06.23. https://doi.org/10.1063/1.1530882

Novel applications of intense pulsed ion beams in materials science. / Yatsui, K.; Jiang, W.; Suematsu, H. et al.
BEAMS 2002 - 14th International Conference on High-Power Particle Beams. IEEE Computer Society, 2002. p. 401-404 6219473 (BEAMS 2002 - 14th International Conference on High-Power Particle Beams; Vol. 1).

Research output: Contribution to conference › Conference paper › peer-review

TY - GEN

T1 - Novel applications of intense pulsed ion beams in materials science

AU - Yatsui, K.

AU - Jiang, W.

AU - Suematsu, H.

AU - Endo, F.

AU - Yang, S. C.

PY - 2002

Y1 - 2002

N2 - Using pulsed ion beam evaporation technique, experimental studies were carried out to embed metals into via holes in LSI. It will be shown that tungsten is successfully embedded in via holes with the aspect ratio of 4.3. Furthermore, light emission of blue has been observed from a poly silicon nanosize powders, which is also produced by pulsed ion beam evaporation technique.

AB - Using pulsed ion beam evaporation technique, experimental studies were carried out to embed metals into via holes in LSI. It will be shown that tungsten is successfully embedded in via holes with the aspect ratio of 4.3. Furthermore, light emission of blue has been observed from a poly silicon nanosize powders, which is also produced by pulsed ion beam evaporation technique.

UR - https://www.scopus.com/pages/publications/84865037507

U2 - 10.1063/1.1530882

DO - 10.1063/1.1530882

M3 - Conference paper

AN - SCOPUS:84865037507

SN - 9780735401075

T3 - BEAMS 2002 - 14th International Conference on High-Power Particle Beams

SP - 401

EP - 404

BT - BEAMS 2002 - 14th International Conference on High-Power Particle Beams

PB - IEEE Computer Society

T2 - 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002

Y2 - 23 June 2002 through 28 June 2002

ER -

Novel applications of intense pulsed ion beams in materials science

Abstract

Publication series

Conference

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