Novel frequency agile electromagnetic decoupling MEMS device

  • Yun Ho Jang*
  • , Ignacio Llamas-Garro
  • , Jung Mu Kim
  • , Yong Kweon Kim
  • *Corresponding author for this work

Research output: Contribution to conferenceConference paperpeer-review

Abstract

We firstly propose the concept of a frequency agile electromagnetic decoupling MEMS-based device. We experimentally show the feasibility of such an apparatus, and further work consists in cascading more than one decoupling device to achieve stronger electromagnetic decoupling values. The structure consists of a freestanding half-wavelength resonator mounted on a movable shuttle connected with large displacement comb actuators. The lateral movement of the shuttle over the main transmission line produces different electromagnetic decoupling values with a variable center frequency. The freestanding resonator plays the role of a loading capacitor as well as the decoupling mechanism in the proposed structure. The device is able to produce diverse decoupling and center frequency effects depending on the overlapping region between the main line and the movable shuttle.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2794-2797
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011.06.52011.06.9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period11.06.511.06.9

Keywords

  • comb actuator
  • Electromagnetic decoupling
  • filter
  • half-wavelength resonator
  • RF MEMS

Quacquarelli Symonds(QS) Subject Topics

  • Computer Science & Information Systems
  • Engineering - Electrical & Electronic
  • Engineering - Petroleum

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