Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System

Shafeeque G. Ansari; Hyung Kee Seo; Gil Sung Kim; Md Shahjahan; Hyung Shik Shin

doi:10.1007/BF02705408

Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System

Shafeeque G. Ansari
, Hyung Kee Seo
, Gil Sung Kim
, Md Shahjahan
, Hyung Shik Shin^*

^*Corresponding author for this work

Division of Chemical Engineering

Jeonbuk National University

Research output: Contribution to journal › Journal article › peer-review

3 Scopus citations

Abstract

We studied the use of carbon nanotubes as a seeding layer for the nucleation of diamond on Si (100) substrate by using a hot filament chemical vapor deposition (HFCVD) system. Prior to deposition, substrates were seeded with multi-wall carbon nanotube (MWCNT) powder which was prepared separately. MWCNTs were used as nucleation precursors. The diamond grains grew essentially over the nanotubes with a higher growth density in comparison with the un-seeded substrates. The scanning electron microscopy (SEM) image of surface morphology shows crystallites of cauliflower shaped grains. The micro Raman spectroscopic results show a sharp peak at 1,332 cm^-1 corresponding to diamond phase. X-ray photoelectron spectroscopic study show the presence of carbon (C_1s) phase.

Original language	English
Pages (from-to)	262-266
Number of pages	5
Journal	Korean Journal of Chemical Engineering
Volume	21
Issue number	1
DOIs	https://doi.org/10.1007/BF02705408
State	Published - 2004.01

Keywords

Carbon Nanotubes Seeding
Diamond
HFCVD

Quacquarelli Symonds(QS) Subject Topics

Engineering - Chemical
Chemistry

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10.1007/BF02705408

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@article{29bfa209a2154708a9e6b96a5dfe900f,

title = "Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System",

abstract = "We studied the use of carbon nanotubes as a seeding layer for the nucleation of diamond on Si (100) substrate by using a hot filament chemical vapor deposition (HFCVD) system. Prior to deposition, substrates were seeded with multi-wall carbon nanotube (MWCNT) powder which was prepared separately. MWCNTs were used as nucleation precursors. The diamond grains grew essentially over the nanotubes with a higher growth density in comparison with the un-seeded substrates. The scanning electron microscopy (SEM) image of surface morphology shows crystallites of cauliflower shaped grains. The micro Raman spectroscopic results show a sharp peak at 1,332 cm-1 corresponding to diamond phase. X-ray photoelectron spectroscopic study show the presence of carbon (C1s) phase.",

keywords = "Carbon Nanotubes Seeding, Diamond, HFCVD",

author = "Ansari, \{Shafeeque G.\} and Seo, \{Hyung Kee\} and Kim, \{Gil Sung\} and Md Shahjahan and Shin, \{Hyung Shik\}",

year = "2004",

month = jan,

doi = "10.1007/BF02705408",

language = "English",

volume = "21",

pages = "262--266",

journal = "Korean Journal of Chemical Engineering",

issn = "0256-1115",

number = "1",

}

TY - JOUR

T1 - Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System

AU - Ansari, Shafeeque G.

AU - Seo, Hyung Kee

AU - Kim, Gil Sung

AU - Shahjahan, Md

AU - Shin, Hyung Shik

PY - 2004/1

Y1 - 2004/1

N2 - We studied the use of carbon nanotubes as a seeding layer for the nucleation of diamond on Si (100) substrate by using a hot filament chemical vapor deposition (HFCVD) system. Prior to deposition, substrates were seeded with multi-wall carbon nanotube (MWCNT) powder which was prepared separately. MWCNTs were used as nucleation precursors. The diamond grains grew essentially over the nanotubes with a higher growth density in comparison with the un-seeded substrates. The scanning electron microscopy (SEM) image of surface morphology shows crystallites of cauliflower shaped grains. The micro Raman spectroscopic results show a sharp peak at 1,332 cm-1 corresponding to diamond phase. X-ray photoelectron spectroscopic study show the presence of carbon (C1s) phase.

AB - We studied the use of carbon nanotubes as a seeding layer for the nucleation of diamond on Si (100) substrate by using a hot filament chemical vapor deposition (HFCVD) system. Prior to deposition, substrates were seeded with multi-wall carbon nanotube (MWCNT) powder which was prepared separately. MWCNTs were used as nucleation precursors. The diamond grains grew essentially over the nanotubes with a higher growth density in comparison with the un-seeded substrates. The scanning electron microscopy (SEM) image of surface morphology shows crystallites of cauliflower shaped grains. The micro Raman spectroscopic results show a sharp peak at 1,332 cm-1 corresponding to diamond phase. X-ray photoelectron spectroscopic study show the presence of carbon (C1s) phase.

KW - Carbon Nanotubes Seeding

KW - Diamond

KW - HFCVD

UR - https://www.scopus.com/pages/publications/1942443924

U2 - 10.1007/BF02705408

DO - 10.1007/BF02705408

M3 - Journal article

AN - SCOPUS:1942443924

SN - 0256-1115

VL - 21

SP - 262

EP - 266

JO - Korean Journal of Chemical Engineering

JF - Korean Journal of Chemical Engineering

IS - 1

ER -

Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System

Abstract

Keywords

Quacquarelli Symonds(QS) Subject Topics

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