Optical and electrical investigation of DC micro-hollow cathode discharge in He/O2 and He/H2 mixture

Deog Gyun Cho; Se Youn Moon

doi:10.1063/1.5037699

Optical and electrical investigation of DC micro-hollow cathode discharge in He/O₂ and He/H₂ mixture

Deog Gyun Cho
, Se Youn Moon^*

^*Corresponding author for this work

Department of Quantum System Engineering

Jeonbuk National University

Research output: Contribution to journal › Journal article › peer-review

6 Scopus citations

Abstract

A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O₂ plasma and VUV hydrogen Lyman-α line in He/H₂ plasma were realized in the hollow cathode discharge mode.

Original language	English
Article number	073506
Journal	Physics of Plasmas
Volume	25
Issue number	7
DOIs	https://doi.org/10.1063/1.5037699
State	Published - 2018.07.1

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Quacquarelli Symonds(QS) Subject Topics

Physics & Astronomy

Access to Document

10.1063/1.5037699

Cite this

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title = "Optical and electrical investigation of DC micro-hollow cathode discharge in He/O2 and He/H2 mixture",

abstract = "A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O2 plasma and VUV hydrogen Lyman-α line in He/H2 plasma were realized in the hollow cathode discharge mode.",

author = "Cho, \{Deog Gyun\} and Moon, \{Se Youn\}",

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AU - Cho, Deog Gyun

AU - Moon, Se Youn

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N2 - A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O2 plasma and VUV hydrogen Lyman-α line in He/H2 plasma were realized in the hollow cathode discharge mode.

AB - A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O2 plasma and VUV hydrogen Lyman-α line in He/H2 plasma were realized in the hollow cathode discharge mode.

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