@inbook{aced5d8cd9d648b895031331e3da36ac,
title = "Optical and Electron Microscopy for Analysis of Nanomaterials",
abstract = "Not only is fabrication important for research in materials science, but also materials characterization and analysis. Special microscopes capable of ultra-high magnification are more essential for observing and analyzing nanoparticles than for macro-size particles. Recently, electron microscopy (EM) and scanning probe microscopy (SPM) are commonly used for observing and analyzing nanoparticles. In this chapter, the basic principles of various techniques in optical and electron microscopy are described and classified. In particular, techniques such as transmission electron microscopy (TEM) and scanning electron microscopy (SEM) are explained.",
keywords = "Atomic force microscopy (AFM), Electron microscopy (EM), Microscopy, Near-field scanning optical microscopy (NSOM), Scanning electron microscopy (SEM), Scanning probe microscopy (SPM), Scanning tunneling microscopy (STM), Transmission electron microscopy (TEM)",
author = "Hyoyeon Kim and Murata, \{Michael M.\} and Hyejin Chang and Lee, \{Sang Hun\} and Jaehi Kim and Lee, \{Jong Hun\} and Rho, \{Won Yeop\} and Jun, \{Bong Hyun\}",
note = "Publisher Copyright: {\textcopyright} 2021, Springer Nature Singapore Pte Ltd.",
year = "2021",
doi = "10.1007/978-981-33-6158-4\_12",
language = "English",
series = "Advances in Experimental Medicine and Biology",
publisher = "Springer",
pages = "277--287",
booktitle = "Advances in Experimental Medicine and Biology",
}