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Optical Microscope combined with the Nanopipette-based Quartz Tuning Fork - Atomic Force Microscope for Nanolithography

  • Sangmin An
  • , Corey Stambaugh
  • , Soyoung Kwon
  • , Kunyoung Lee
  • , Bongsu Kim
  • , Qwhan Kim
  • , Wonho Jhe
  • Seoul National University
  • National Institute of Standards and Technology

Research output: Contribution to conferenceConference paperpeer-review

Abstract

We demonstrated the optical microscope (OM) combined with nanopipette-based quartz tuning fork - atomic force microscope (QTF-AFM) for nanolithography. The nanoparticle (Au, 5 nm), nanowire, PDMS solutions are ejected onto the substrate through the nano/microaperture of the pulled pipette, and the nano/microscale objects were in-situ formed on the surface with the proposed patterning system, while the position is defined by monitoring the phenomena on the substrate with a home-made OM. After forming of capillary condensation between apex of the pipette tip and the surface, the electric field is applied to extract out the inside liquid to the substrate and the nano/microscale objects are fabricated. The nanoscale patterning size can be controlled by the aperture diameters of the pulled pipette.

Original languageEnglish
Title of host publicationNanoengineering
Subtitle of host publicationFabrication, Properties, Optics, and Devices X
DOIs
StatePublished - 2013
EventNanoengineering: Fabrication, Properties, Optics, and Devices X - San Diego, CA, United States
Duration: 2013.08.272013.08.29

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8816
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceNanoengineering: Fabrication, Properties, Optics, and Devices X
Country/TerritoryUnited States
CitySan Diego, CA
Period13.08.2713.08.29

Keywords

  • Liquid delivery
  • Nanopatterning
  • Nanopipette/QTF-AFM
  • Nanowire
  • PDMS

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