Abstract
We report the fabrication of InGaN/GaN multi quantum well (MQW) microdisk arrays on Si(111) substrates. InGaN/GaN MQWs were grown on highly tensile-strained GaN films on Si(111) substrate by metalorganic chemical vapor deposition. Microdisk resonators were fabricated using a combination of optical lithography, a dry GaN-etching process, and Si undercut etching by acid chemical solution. The evidence of whispering-gallery modes in optically pumped microdisk cavities have been observed by photoluminescence.
| Original language | English |
|---|---|
| Pages (from-to) | 2063-2065 |
| Number of pages | 3 |
| Journal | Physica Status Solidi (C) Current Topics in Solid State Physics |
| Volume | 5 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2008 |
| Event | 7th International Conference of Nitride Semiconductors, ICNS-7 - Las Vegas, NV, United States Duration: 2007.09.16 → 2007.09.21 |
Quacquarelli Symonds(QS) Subject Topics
- Physics & Astronomy
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