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Optimization of Signal to Noise Ratio in Silicon Nanowire ISFET Sensors

  • Hyeonsu Cho
  • , Kihyun Kim
  • , Jun Sik Yoon
  • , Taiuk Rim
  • , M. Meyyappan
  • , Chang Ki Baek
  • Pohang University of Science and Technology
  • NASA Ames Research Center

Research output: Contribution to journalJournal articlepeer-review

Abstract

Inversion-mode (IM) and depletion-mode (DM) ion-sensitive field effect transistors (ISFETs) are investigated in terms of dc characteristics, pH response and low-frequency noise (LFN) characteristics. The dc characteristics show a low threshold voltage (VTH) of 28 mV for the DM ISFETs, which is preferred for the long lifetime of the pseudo-reference electrode. The DM ISFETs exhibit an enhanced pH response in the sub-threshold region, which comes from the lower sub-threshold swing. The LFN analysis for both devices shows similar level of noise equivalent current (In.RMS) near VTH; otherwise, a reduction of In.RMS is obtained in the DM ISFETs in the linear region. In addition, the signal-to-noise ratio of the DM ISFETs is improved by 82.9% compared with the IM ISFETs in the sub-threshold region. Consequently, the DM ISFETs can be a better sensor platform for low-power, portable, and high-precision performance.

Original languageEnglish
Article number7864382
Pages (from-to)2792-2796
Number of pages5
JournalIEEE Sensors Journal
Volume17
Issue number9
DOIs
StatePublished - 2017.05.1

Keywords

  • channel doping
  • depletion-mode
  • honeycomb structure
  • Ion-sensitive field effect transistor
  • low frequency noise
  • pH sensor

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