Abstract
Inversion-mode (IM) and depletion-mode (DM) ion-sensitive field effect transistors (ISFETs) are investigated in terms of dc characteristics, pH response and low-frequency noise (LFN) characteristics. The dc characteristics show a low threshold voltage (VTH) of 28 mV for the DM ISFETs, which is preferred for the long lifetime of the pseudo-reference electrode. The DM ISFETs exhibit an enhanced pH response in the sub-threshold region, which comes from the lower sub-threshold swing. The LFN analysis for both devices shows similar level of noise equivalent current (In.RMS) near VTH; otherwise, a reduction of In.RMS is obtained in the DM ISFETs in the linear region. In addition, the signal-to-noise ratio of the DM ISFETs is improved by 82.9% compared with the IM ISFETs in the sub-threshold region. Consequently, the DM ISFETs can be a better sensor platform for low-power, portable, and high-precision performance.
| Original language | English |
|---|---|
| Article number | 7864382 |
| Pages (from-to) | 2792-2796 |
| Number of pages | 5 |
| Journal | IEEE Sensors Journal |
| Volume | 17 |
| Issue number | 9 |
| DOIs | |
| State | Published - 2017.05.1 |
Keywords
- channel doping
- depletion-mode
- honeycomb structure
- Ion-sensitive field effect transistor
- low frequency noise
- pH sensor
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