@inproceedings{c9526a639a6f4d8bb7849c2f13555228,
title = "Phase image correlation based high sensitive optical nanoscope",
abstract = "We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. Since the proposed off-axis scheme based on a matched filter correlation method basically measure the phase information of a nano object, the proposed scheme has some benefits in terms of sensitivity in both 3D geometry measurement and defect inspection capability. in this study, the feasibility of the proposed scheme has been evaluated by combining the conical diffraction and wave propagation simulation codes.",
keywords = "Angle resolved ellipsometry, Optical 3d nanoscope, Phase correlation, Scatterometry",
author = "Daesuk Kim and Baek, \{Byung Joon\} and Zvyagin, \{Andrei V.\} and Hyungchul Lee and Cho, \{Yong Jai\}",
year = "2011",
doi = "10.1117/12.899605",
language = "English",
isbn = "9780819488008",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Photonics 2010",
note = "Photonics 2010: 10th International Conference on Fiber Optics and Photonics ; Conference date: 11-12-2010 Through 15-12-2010",
}