Abstract
We demonstrate a back-emitting (sapphire-substrate emitting) linearly polarized GaInN light-emitting diode (LED) embedded with a subwavelength-sized aluminum wire-grid polarizer (WGP). Rigorous coupled wave analysis is implemented to study the polarization characteristics of such a WGP LED. The aluminum nanowire grating with a period of 150 nm is located on the sapphire backside of a GaInN LED structure and is fabricated by electron-beam lithography and inductively coupled plasma reactive-ion etching. A polarization ratio of 0.96 is demonstrated for a WGP GaInN LED in good agreement with simulation results.
| Original language | English |
|---|---|
| Article number | 061103 |
| Journal | Applied Physics Letters |
| Volume | 101 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2012.08.6 |
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