TY - GEN
T1 - Quick preparation of thin films and nanosize powders by high-density ablation plasma produced by intense pulsed ion beam
AU - Yatsui, K.
AU - Jiang, W.
AU - Suematsu, H.
AU - Suzuki, T.
AU - Kinemuchi, Y.
AU - Yang, S. C.
N1 - Publisher Copyright:
© 2002 IEEE.
PY - 2015
Y1 - 2015
N2 - Using high-density ablation plasma produced by the intense pulsed ion beam interaction with solid targets, we have successfully prepared various kinds of thin films or ultrafine nanosize powders by rapid cooling, which was named pulsed ion beam evaporation (IBE). Very quick and stoichiometric preparation is available by the ablation plasma (density ∼ 1019 cm-3) in vacuum, without heating substrate or without post-annealing. Since we have reported the preparation of thin films of ZnS in 1988 [1], we only discuss the preparation of crystallized B4C films, because we believe this is the first demonstration in the world. As known, B4C is very hard after diamond, wear resistant, and stable at high temperature. The experiment was done by an intense pulsed power machine, "ETIGO-II". Using various diagnostics by XRD, FT-IR, FE-SEM, TEM, EELS, and Vickers hardness, we have confirmed the preparation of the crystallized B4C films [2]. Absorptions associated with B-C bond have been clearly observed. The maximum Vickers harness was achieved to 2,300.
AB - Using high-density ablation plasma produced by the intense pulsed ion beam interaction with solid targets, we have successfully prepared various kinds of thin films or ultrafine nanosize powders by rapid cooling, which was named pulsed ion beam evaporation (IBE). Very quick and stoichiometric preparation is available by the ablation plasma (density ∼ 1019 cm-3) in vacuum, without heating substrate or without post-annealing. Since we have reported the preparation of thin films of ZnS in 1988 [1], we only discuss the preparation of crystallized B4C films, because we believe this is the first demonstration in the world. As known, B4C is very hard after diamond, wear resistant, and stable at high temperature. The experiment was done by an intense pulsed power machine, "ETIGO-II". Using various diagnostics by XRD, FT-IR, FE-SEM, TEM, EELS, and Vickers hardness, we have confirmed the preparation of the crystallized B4C films [2]. Absorptions associated with B-C bond have been clearly observed. The maximum Vickers harness was achieved to 2,300.
UR - https://www.scopus.com/pages/publications/84951981491
U2 - 10.1109/PPPS.2001.01002147
DO - 10.1109/PPPS.2001.01002147
M3 - Conference paper
AN - SCOPUS:84951981491
T3 - PPPS 2001 - Pulsed Power Plasma Science 2001
SP - 520
EP - 523
BT - PPPS 2001 - Pulsed Power Plasma Science 2001
A2 - Reinovsky, Robert
A2 - Newton, Mark
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference, PPPS 2001
Y2 - 17 June 2001 through 22 June 2001
ER -