Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

D. G. Abdelsalam; M. S. Shaalan; M. M. Eloker; Daesuk Kim

doi:10.1016/j.optlaseng.2010.02.007

Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

D. G. Abdelsalam
, M. S. Shaalan
, M. M. Eloker
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

National Institute of Standards
Al-Azhar University

Research output: Contribution to journal › Journal article › peer-review

48 Scopus citations

Abstract

In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38 000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within λ/40.

Original language	English
Pages (from-to)	643-649
Number of pages	7
Journal	Optics and Lasers in Engineering
Volume	48
Issue number	6
DOIs	https://doi.org/10.1016/j.optlaseng.2010.02.007
State	Published - 2010.06

Keywords

Curved surfaces
Flat fielding
Multiple-beam
Ray tracing
Zernike Polynomial

Quacquarelli Symonds(QS) Subject Topics

Engineering - Mechanical
Materials Science
Engineering - Electrical & Electronic
Engineering - Petroleum
Physics & Astronomy

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10.1016/j.optlaseng.2010.02.007

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@article{da3cbdaed0694d80bce141460e667a1c,

title = "Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection",

abstract = "In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38 000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within λ/40.",

keywords = "Curved surfaces, Flat fielding, Multiple-beam, Ray tracing, Zernike Polynomial",

author = "Abdelsalam, \{D. G.\} and Shaalan, \{M. S.\} and Eloker, \{M. M.\} and Daesuk Kim",

year = "2010",

month = jun,

doi = "10.1016/j.optlaseng.2010.02.007",

language = "English",

volume = "48",

pages = "643--649",

journal = "Optics and Lasers in Engineering",

issn = "0143-8166",

number = "6",

}

TY - JOUR

T1 - Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

AU - Abdelsalam, D. G.

AU - Shaalan, M. S.

AU - Eloker, M. M.

AU - Kim, Daesuk

PY - 2010/6

Y1 - 2010/6

N2 - In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38 000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within λ/40.

AB - In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38 000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within λ/40.

KW - Curved surfaces

KW - Flat fielding

KW - Multiple-beam

KW - Ray tracing

KW - Zernike Polynomial

UR - https://www.scopus.com/pages/publications/77949879815

U2 - 10.1016/j.optlaseng.2010.02.007

DO - 10.1016/j.optlaseng.2010.02.007

M3 - Journal article

AN - SCOPUS:77949879815

SN - 0143-8166

VL - 48

SP - 643

EP - 649

JO - Optics and Lasers in Engineering

JF - Optics and Lasers in Engineering

IS - 6

ER -

Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

Abstract

Keywords

Quacquarelli Symonds(QS) Subject Topics

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