@inproceedings{aeed1294823740f8947fb4eeb8ea3bd8,
title = "Real time optical 3D nanoscope using phase contrast digital holography",
abstract = "We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.",
keywords = "angle resolved ellipsometry, defect inspection, digital holography, optical 3D nano-scope, scatterometry",
author = "D. Kim and A. Zvyagin and H. Lee and Y. Cho",
year = "2011",
doi = "10.1063/1.3666748",
language = "English",
isbn = "9780735410022",
series = "AIP Conference Proceedings",
pages = "1071--1072",
booktitle = "Physics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30",
note = "30th International Conference on the Physics of Semiconductors, ICPS-30 ; Conference date: 25-07-2010 Through 30-07-2010",
}