Reflectance Analysis of the Otto Chip Using an Automated Reflectometer

Yeonsu Lee; Sung Min Sim; Maria Renata Nascimento Dos Santos; Gabriel De Freitas Fernandes; Gustavo Oliveira Cavalcanti; Ignacio Llamas-Garro; Eduardo Fontana; Jung Mu Kim

doi:10.1109/OMN.2018.8454569

Reflectance Analysis of the Otto Chip Using an Automated Reflectometer

Yeonsu Lee
, Sung Min Sim
, Maria Renata Nascimento Dos Santos
, Gabriel De Freitas Fernandes
, Gustavo Oliveira Cavalcanti
, Ignacio Llamas-Garro
, Eduardo Fontana
, Jung Mu Kim

Division of Electronic Engineering

Jeonbuk National University
Universidade de Pernambuco
Universidade Federal de Pernambuco

Research output: Contribution to conference › Conference paper › peer-review

3 Scopus citations

Abstract

This paper reports an experimental study focused on the characterization of the Otto chip device. These devices are structures sealed with a glass window, having a gold film, which is separated from the window surface by a well-defined gap. The gap is designed for the surface plasmon resonance effect. In this study, gap profiles were scanned by optical reflectometry. A preliminary analysis of reflectance curve patterns allows mapping the topography of the different regions of the chip. The results of the study can be used to optimize the manufacturing process of this type of structure.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454569
State	Published - 2018.09.4
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018.07.29 → 2018.08.2

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2018-July
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country/Territory	Switzerland
City	Lausanne
Period	18.07.29 → 18.08.2

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

optical profilometry
Otto chip
reflectometry
sensors
SPR

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Computer Science & Information Systems
Engineering - Electrical & Electronic
Engineering - Petroleum

Access to Document

10.1109/OMN.2018.8454569

Cite this

Lee, Y., Sim, S. M., Nascimento Dos Santos, M. R., De Freitas Fernandes, G., Cavalcanti, G. O., Llamas-Garro, I., Fontana, E., & Kim, J. M. (2018). Reflectance Analysis of the Otto Chip Using an Automated Reflectometer. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings Article 8454569 (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454569

@inproceedings{aff111044d8249bb93ce61ca246fda14,

title = "Reflectance Analysis of the Otto Chip Using an Automated Reflectometer",

abstract = "This paper reports an experimental study focused on the characterization of the Otto chip device. These devices are structures sealed with a glass window, having a gold film, which is separated from the window surface by a well-defined gap. The gap is designed for the surface plasmon resonance effect. In this study, gap profiles were scanned by optical reflectometry. A preliminary analysis of reflectance curve patterns allows mapping the topography of the different regions of the chip. The results of the study can be used to optimize the manufacturing process of this type of structure.",

keywords = "optical profilometry, Otto chip, reflectometry, sensors, SPR",

author = "Yeonsu Lee and Sim, \{Sung Min\} and \{Nascimento Dos Santos\}, \{Maria Renata\} and \{De Freitas Fernandes\}, Gabriel and Cavalcanti, \{Gustavo Oliveira\} and Ignacio Llamas-Garro and Eduardo Fontana and Kim, \{Jung Mu\}",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",

year = "2018",

month = sep,

day = "4",

doi = "10.1109/OMN.2018.8454569",

language = "English",

isbn = "9781509063727",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",

}

Lee, Y, Sim, SM, Nascimento Dos Santos, MR, De Freitas Fernandes, G, Cavalcanti, GO, Llamas-Garro, I, Fontana, E & Kim, JM 2018, Reflectance Analysis of the Otto Chip Using an Automated Reflectometer. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., 8454569, International Conference on Optical MEMS and Nanophotonics, vol. 2018-July, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18.07.29. https://doi.org/10.1109/OMN.2018.8454569

Reflectance Analysis of the Otto Chip Using an Automated Reflectometer. / Lee, Yeonsu; Sim, Sung Min; Nascimento Dos Santos, Maria Renata et al.
International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. 8454569 (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July).

Research output: Contribution to conference › Conference paper › peer-review

TY - GEN

T1 - Reflectance Analysis of the Otto Chip Using an Automated Reflectometer

AU - Lee, Yeonsu

AU - Sim, Sung Min

AU - Nascimento Dos Santos, Maria Renata

AU - De Freitas Fernandes, Gabriel

AU - Cavalcanti, Gustavo Oliveira

AU - Llamas-Garro, Ignacio

AU - Fontana, Eduardo

AU - Kim, Jung Mu

PY - 2018/9/4

Y1 - 2018/9/4

N2 - This paper reports an experimental study focused on the characterization of the Otto chip device. These devices are structures sealed with a glass window, having a gold film, which is separated from the window surface by a well-defined gap. The gap is designed for the surface plasmon resonance effect. In this study, gap profiles were scanned by optical reflectometry. A preliminary analysis of reflectance curve patterns allows mapping the topography of the different regions of the chip. The results of the study can be used to optimize the manufacturing process of this type of structure.

AB - This paper reports an experimental study focused on the characterization of the Otto chip device. These devices are structures sealed with a glass window, having a gold film, which is separated from the window surface by a well-defined gap. The gap is designed for the surface plasmon resonance effect. In this study, gap profiles were scanned by optical reflectometry. A preliminary analysis of reflectance curve patterns allows mapping the topography of the different regions of the chip. The results of the study can be used to optimize the manufacturing process of this type of structure.

KW - optical profilometry

KW - Otto chip

KW - reflectometry

KW - sensors

KW - SPR

UR - https://www.scopus.com/pages/publications/85053860658

U2 - 10.1109/OMN.2018.8454569

DO - 10.1109/OMN.2018.8454569

M3 - Conference paper

AN - SCOPUS:85053860658

SN - 9781509063727

T3 - International Conference on Optical MEMS and Nanophotonics

BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings

PB - IEEE Computer Society

T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018

Y2 - 29 July 2018 through 2 August 2018

ER -

Lee Y, Sim SM, Nascimento Dos Santos MR, De Freitas Fernandes G, Cavalcanti GO, Llamas-Garro I et al. Reflectance Analysis of the Otto Chip Using an Automated Reflectometer. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society. 2018. 8454569. (International Conference on Optical MEMS and Nanophotonics). doi: 10.1109/OMN.2018.8454569

Reflectance Analysis of the Otto Chip Using an Automated Reflectometer

Abstract

Publication series

Conference

UN SDGs

Keywords

Quacquarelli Symonds(QS) Subject Topics

Access to Document

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