@inproceedings{4c57d0cb35db4db9a9bbef3cbf5dad2c,
title = "Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System",
abstract = "This paper introduces auto bias electrical variable capacitor(EVC) with reduced active components and voltage, current stress that mitigated switch noise for 13.56MHz RF plasma process. The proposed circuit have a small volume and low cost of EVC by using a small number of active components for the variable operation of the electrical variable capacitor, and enables more effective use in high-power systems through low switch voltage and current stress. In addition, the RF component flowing through the switch is effectively blocked to increase the operational reliability of the switch. The proposed circuit can be effectively replaced in the impedance matching network of RF plasma systems that require high power and high reliability.",
keywords = "Electrical variable capacitor, Impedance matching, Plasma system, Vacuum variable capacitor",
author = "Juhwa Min and Heewon Choi and Yongsug Suh",
note = "Publisher Copyright: {\textcopyright} 2023 The Korean Institute of Power Electronics.; 11th International Conference on Power Electronics - ECCE Asia, ICPE 2023-ECCE Asia ; Conference date: 22-05-2023 Through 25-05-2023",
year = "2023",
doi = "10.23919/ICPE2023-ECCEAsia54778.2023.10213472",
language = "English",
series = "ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia: Green World with Power Electronics",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1255--1262",
booktitle = "ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia",
}