Sealing of AIAs against wet oxidation and its use in the fabrication of vertical-cavity surface-emitting lasers

We have studied the process of sealing an exposed A1As to prevent further wet oxidation. A critical step in this sealing process consists of the first wet oxidation for a short time at 408 °C in a steam environment of a previously room-ambient exposed A1As surface. During this brief wet oxidation, a dense oxide surface barrier with a thickness of 1.1 μm is formed, which further blocks diffusing oxygen species during the second wet oxidation. The effectiveness of the sealing is demonstrated through its use as a mask against wet oxidation in the fabrication of oxide-confined vertical-cavity surface-emitting lasers.