Silicon MEMS acceleration switch with high reliability using hooked latch

Yeonsu Lee; Sung Min Sim; Hyunseok Kim; Yong Kweon Kim; Jung Mu Kim

doi:10.1016/j.mee.2015.12.016

Silicon MEMS acceleration switch with high reliability using hooked latch

Yeonsu Lee
, Sung Min Sim
, Hyunseok Kim
, Yong Kweon Kim
, Jung Mu Kim^*

^*Corresponding author for this work

Division of Electronic Engineering

Jeonbuk National University
Seoul National University

Research output: Contribution to journal › Journal article › peer-review

21 Scopus citations

Abstract

In this study, a MEMS acceleration switch using mechanical hooked latch is designed, fabricated, and measured. A mechanical latching mechanism and switching characteristic are analyzed using FEM simulation. The acceleration switch with a size of 1.8 × 3.2 × 0.55 mm³ was fabricated using a Silicon-on-Glass (SiOG) process. A resonance frequency of the fabricated switch and an acceleration threshold are measured to be 1.022 kHz and 43.7 g, respectively. The fabricated switch is latched when an applied external acceleration is higher than the threshold value of 43.7 g. After latching "on", the "on" state of the switch is reliably sustained regardless of the applied external acceleration.

Original language	English
Pages (from-to)	10-19
Number of pages	10
Journal	Microelectronic Engineering
Volume	152
DOIs	https://doi.org/10.1016/j.mee.2015.12.016
State	Published - 2016.02.20

Keywords

Acceleration threshold
Chattering phenomenon
Inertial measurement unit
Mechanical latch
MEMS acceleration switch

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Engineering - Electrical & Electronic
Engineering - Petroleum
Physics & Astronomy

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10.1016/j.mee.2015.12.016

Cite this

@article{d0994e67556f408ca6ce3c64c87b59cf,

title = "Silicon MEMS acceleration switch with high reliability using hooked latch",

abstract = "In this study, a MEMS acceleration switch using mechanical hooked latch is designed, fabricated, and measured. A mechanical latching mechanism and switching characteristic are analyzed using FEM simulation. The acceleration switch with a size of 1.8 × 3.2 × 0.55 mm3 was fabricated using a Silicon-on-Glass (SiOG) process. A resonance frequency of the fabricated switch and an acceleration threshold are measured to be 1.022 kHz and 43.7 g, respectively. The fabricated switch is latched when an applied external acceleration is higher than the threshold value of 43.7 g. After latching {"}on{"}, the {"}on{"} state of the switch is reliably sustained regardless of the applied external acceleration.",

keywords = "Acceleration threshold, Chattering phenomenon, Inertial measurement unit, Mechanical latch, MEMS acceleration switch",

author = "Yeonsu Lee and Sim, \{Sung Min\} and Hyunseok Kim and Kim, \{Yong Kweon\} and Kim, \{Jung Mu\}",

year = "2016",

month = feb,

day = "20",

doi = "10.1016/j.mee.2015.12.016",

language = "English",

volume = "152",

pages = "10--19",

journal = "Microelectronic Engineering",

issn = "0167-9317",

}

TY - JOUR

T1 - Silicon MEMS acceleration switch with high reliability using hooked latch

AU - Lee, Yeonsu

AU - Sim, Sung Min

AU - Kim, Hyunseok

AU - Kim, Yong Kweon

AU - Kim, Jung Mu

PY - 2016/2/20

Y1 - 2016/2/20

N2 - In this study, a MEMS acceleration switch using mechanical hooked latch is designed, fabricated, and measured. A mechanical latching mechanism and switching characteristic are analyzed using FEM simulation. The acceleration switch with a size of 1.8 × 3.2 × 0.55 mm3 was fabricated using a Silicon-on-Glass (SiOG) process. A resonance frequency of the fabricated switch and an acceleration threshold are measured to be 1.022 kHz and 43.7 g, respectively. The fabricated switch is latched when an applied external acceleration is higher than the threshold value of 43.7 g. After latching "on", the "on" state of the switch is reliably sustained regardless of the applied external acceleration.

AB - In this study, a MEMS acceleration switch using mechanical hooked latch is designed, fabricated, and measured. A mechanical latching mechanism and switching characteristic are analyzed using FEM simulation. The acceleration switch with a size of 1.8 × 3.2 × 0.55 mm3 was fabricated using a Silicon-on-Glass (SiOG) process. A resonance frequency of the fabricated switch and an acceleration threshold are measured to be 1.022 kHz and 43.7 g, respectively. The fabricated switch is latched when an applied external acceleration is higher than the threshold value of 43.7 g. After latching "on", the "on" state of the switch is reliably sustained regardless of the applied external acceleration.

KW - Acceleration threshold

KW - Chattering phenomenon

KW - Inertial measurement unit

KW - Mechanical latch

KW - MEMS acceleration switch

UR - https://www.scopus.com/pages/publications/84952317839

U2 - 10.1016/j.mee.2015.12.016

DO - 10.1016/j.mee.2015.12.016

M3 - Journal article

AN - SCOPUS:84952317839

SN - 0167-9317

VL - 152

SP - 10

EP - 19

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Silicon MEMS acceleration switch with high reliability using hooked latch

Abstract

Keywords

Quacquarelli Symonds(QS) Subject Topics

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