Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

J. M. Kim; I. J. Hyeon; K. Cho; H. J. Lee; Y. K. Kim; T. K. Chung; H. S. Kim; C. W. Baek

doi:10.1049/el:20083091

Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

J. M. Kim^*
, I. J. Hyeon
, K. Cho
, H. J. Lee
, Y. K. Kim
, T. K. Chung
, H. S. Kim
, C. W. Baek

^*Corresponding author for this work

Division of Electronic Engineering

Seoul National University
Chung-Ang University
Korea Institute of Machinery and Materials

Research output: Contribution to journal › Journal article › peer-review

Abstract

A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.

Original language	English
Pages (from-to)	283-285
Number of pages	3
Journal	Electronics Letters
Volume	44
Issue number	4
DOIs	https://doi.org/10.1049/el:20083091
State	Published - 2008

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SDG 9 Industry, Innovation, and Infrastructure

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10.1049/el:20083091

Cite this

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title = "Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures",

abstract = "A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.",

author = "Kim, \{J. M.\} and Hyeon, \{I. J.\} and K. Cho and Lee, \{H. J.\} and Kim, \{Y. K.\} and Chung, \{T. K.\} and Kim, \{H. S.\} and Baek, \{C. W.\}",

year = "2008",

doi = "10.1049/el:20083091",

language = "English",

volume = "44",

pages = "283--285",

journal = "Electronics Letters",

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TY - JOUR

T1 - Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

AU - Kim, J. M.

AU - Hyeon, I. J.

AU - Cho, K.

AU - Lee, H. J.

AU - Kim, Y. K.

AU - Chung, T. K.

AU - Kim, H. S.

AU - Baek, C. W.

PY - 2008

Y1 - 2008

N2 - A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.

AB - A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.

UR - https://www.scopus.com/pages/publications/39349088722

U2 - 10.1049/el:20083091

DO - 10.1049/el:20083091

M3 - Journal article

AN - SCOPUS:39349088722

SN - 0013-5194

VL - 44

SP - 283

EP - 285

JO - Electronics Letters

JF - Electronics Letters

IS - 4

ER -

Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

Abstract

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