Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy

Polymeric multimode waveguides were fabricated using a UV-curable epoxy based polymer (SU-8) as the core layer and Cyclotene as the cladding layer. Contact printing lithography was adopted for the fabrication as a simple and low cost process. The materials are thermally stable up to 200°C as evidenced by the little change in refractive index at the temperature under an atmospheric condition. The propagation loss of the multimode waveguide was 0.36 dB/cm at the wavelength of 830 nm. A micro-mirror was also fabricated by contact printing method with tilted exposure.