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Simultaneous Observation of Donor- and Acceptor-like Interface Trap Density in 5-Stage Si-NW GAA FETs Using Polychromatic Photonic I-V Characteristics

  • Soohyun Lim*
  • , Jaewook Yoo
  • , Hongseung Lee
  • , Seongbin Lim
  • , Minah Park
  • , Seohyeon Park
  • , Sojin Jung
  • , Donghyeon Lee
  • , Sieun Lee
  • , Dongsun Shin
  • , Junhui Park
  • , Yang Kyu Choi
  • , Hagyoul Bae
  • *Corresponding author for this work
  • Jeonbuk National University

Research output: Contribution to journalJournal articlepeer-review

Abstract

In this study, we analyzed the interface trap density (Dit) of 5-stage silicon-nanowires (Si-NWs) gate-all-around (GAA) field-effect-transistors (FETs) using polychromatic photonic current-voltage technique in a single device. We modeled photoresponsive differential body factor as a function of gate voltage (VGS) and extracted donor-like Dit (Dit_D) derived from the difference in the photoresponsive differential body factors. In contrast, acceptor-like Dit (Dit_A) was extracted at the dark state. Dit_D and Dit_A are extracted under two different VGS regions: Dit_A for between the flat band voltage (VFB) and the threshold voltage (VT), and Dit_D for between Von and VFB. Accordingly, positive-bias-stress (PBS) was applied to analyze the change in Dit before and after PBS.

Original languageEnglish
JournalIEEE Electron Device Letters
DOIs
StateAccepted/In press - 2026

Keywords

  • Energy levels
  • interface trap density
  • photoresponsivity
  • vertically-stacked gate-all-around (GAA) field effect transistors (FETs)

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