Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme

We describe a single shot dual-reference wave off-axis configuration based on an orthogonal polarization state by using Zeeman type heterodyne laser. The experiment is conducted on a sample of the USAF target. The recorded hologram is processed to obtain an object wave (amplitude and phase) for each polarization state separately. The reconstructed phase maps for each polarization state are subtracted and the phase difference map has been found to be a constant value map. This means the p and s-polarizaiton phase maps are identical for such normal incidence case for that USAF target object. The proposed scheme can provide a very fast solution for featuring the nano pattern 3D objects.