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Snapshot conical diffraction phase image measurement in angle-resolved microellipsometry

  • Daesuk Kim*
  • , Moonseob Jin
  • , Hyunchul Lee
  • , Soohyun Kim
  • , Robert Magnusson
  • *Corresponding author for this work
  • Jeonbuk National University
  • Korea Advanced Institute of Science and Technology
  • University of Texas at Arlington

Research output: Contribution to conferenceConference paperpeer-review

Abstract

We describe a snapshot conical diffraction phase image measurement method in angle resolved microelliposometry employing an objective lens for incidence angle modulation. We expect the proposed scheme can be extended to digital holography based conical diffraction phase image extraction field.

Original languageEnglish
Title of host publicationComputational Optical Sensing and Imaging, COSI 2013
PublisherOptical Society of America (OSA)
ISBN (Print)9781557529756
DOIs
StatePublished - 2013
EventComputational Optical Sensing and Imaging, COSI 2013 - Arlington, VA, United States
Duration: 2013.06.232013.06.27

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceComputational Optical Sensing and Imaging, COSI 2013
Country/TerritoryUnited States
CityArlington, VA
Period13.06.2313.06.27

Quacquarelli Symonds(QS) Subject Topics

  • Physics & Astronomy

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