Snapshot spectro-ellipsometry based on interferometric polarization modulation

  • Daesuk Kim
  • , Vamara Dembele
  • , Yonghee Yoon
  • , Yoonho Seo
  • , Hyunsuk Kim
  • , Jaejong Lee
  • , Robert Magnusson

Research output: Contribution to conferenceConference paperpeer-review

Abstract

This paper describes a snapshot spectro-ellipsometry based on interferometric polarization modulation. The proposed method enables us to obtain an accurate spectral Stokes vector of a thin film object in msec.

Original languageEnglish
Title of host publicationLaser Science, LS 2015
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781943580033
StatePublished - 2015
EventLaser Science, LS 2015 - San Jose, United States
Duration: 2015.10.182015.10.22

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceLaser Science, LS 2015
Country/TerritoryUnited States
CitySan Jose
Period15.10.1815.10.22

Quacquarelli Symonds(QS) Subject Topics

  • Engineering - Mechanical
  • Materials Science

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