Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

Vamara Dembele; Saeid Kheiryzadehkhanghah; Gukhyeon Hwang; Daesuk Kim

doi:10.1364/AO.441657

Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

Vamara Dembele
, Saeid Kheiryzadehkhanghah
, Gukhyeon Hwang
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

Jeonbuk National University

Research output: Contribution to journal › Journal article › peer-review

Abstract

A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range and precision optimization.

Original language	English
Pages (from-to)	10867-10872
Number of pages	6
Journal	Applied Optics
Volume	60
Issue number	35
DOIs	https://doi.org/10.1364/AO.441657
State	Published - 2021.12.10

Quacquarelli Symonds(QS) Subject Topics

Engineering - Electrical & Electronic
Engineering - Petroleum
Physics & Astronomy

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10.1364/AO.441657

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@article{a5eb3e5b07fb40378aeea9570c71faf9,

title = "Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method",

abstract = "A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range and precision optimization.",

author = "Vamara Dembele and Saeid Kheiryzadehkhanghah and Gukhyeon Hwang and Daesuk Kim",

note = "Publisher Copyright: {\textcopyright} 2021 Optical Society of America",

year = "2021",

month = dec,

day = "10",

doi = "10.1364/AO.441657",

language = "English",

volume = "60",

pages = "10867--10872",

journal = "Applied Optics",

issn = "1559-128X",

number = "35",

}

TY - JOUR

T1 - Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

AU - Dembele, Vamara

AU - Kheiryzadehkhanghah, Saeid

AU - Hwang, Gukhyeon

AU - Kim, Daesuk

PY - 2021/12/10

Y1 - 2021/12/10

N2 - A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range and precision optimization.

AB - A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged 1(λ) measurement spectral range and precision optimization.

UR - https://www.scopus.com/pages/publications/85121039064

U2 - 10.1364/AO.441657

DO - 10.1364/AO.441657

M3 - Journal article

C2 - 35200848

AN - SCOPUS:85121039064

SN - 1559-128X

VL - 60

SP - 10867

EP - 10872

JO - Applied Optics

JF - Applied Optics

IS - 35

ER -

Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

Abstract

Quacquarelli Symonds(QS) Subject Topics

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