Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele; Inho Choi; Saeid Kheiryzadehkhanghah; Daesuk Kim

doi:10.1117/12.2592650

Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele
, Inho Choi
, Saeid Kheiryzadehkhanghah
, Daesuk Kim^*

^*Corresponding author for this work

Division of Mechanical System Engineering

Jeonbuk National University

Research output: Contribution to conference › Conference paper › peer-review

Abstract

We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO2 thin film with a nominal thickness of 500 nm deposited on a Si bare wafer.

Original language	English
Title of host publication	Modeling Aspects in Optical Metrology VIII
Editors	Bernd Bodermann, Karsten Frenner
Publisher	SPIE
ISBN (Electronic)	9781510644007
DOIs	https://doi.org/10.1117/12.2592650
State	Published - 2021
Event	Modeling Aspects in Optical Metrology VIII 2021 - Virtual, Online, Germany Duration: 2021.06.21 → 2021.06.25

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11783
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Modeling Aspects in Optical Metrology VIII 2021
Country/Territory	Germany
City	Virtual, Online
Period	21.06.21 → 21.06.25

Keywords

Ellipsometry
Interferometry
Phase measurement
Polarization measurement

Quacquarelli Symonds(QS) Subject Topics

Materials Science
Computer Science & Information Systems
Mathematics
Engineering - Electrical & Electronic
Engineering - Petroleum
Data Science
Physics & Astronomy

Access to Document

10.1117/12.2592650

Cite this

Dembele, V., Choi, I., Kheiryzadehkhanghah, S., & Kim, D. (2021). Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method. In B. Bodermann, & K. Frenner (Eds.), Modeling Aspects in Optical Metrology VIII Article 117830N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11783). SPIE. https://doi.org/10.1117/12.2592650

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title = "Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method",

abstract = "We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO2 thin film with a nominal thickness of 500 nm deposited on a Si bare wafer.",

keywords = "Ellipsometry, Interferometry, Phase measurement, Polarization measurement",

author = "Vamara Dembele and Inho Choi and Saeid Kheiryzadehkhanghah and Daesuk Kim",

note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; Modeling Aspects in Optical Metrology VIII 2021 ; Conference date: 21-06-2021 Through 25-06-2021",

year = "2021",

doi = "10.1117/12.2592650",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Bernd Bodermann and Karsten Frenner",

booktitle = "Modeling Aspects in Optical Metrology VIII",

}

Dembele, V, Choi, I, Kheiryzadehkhanghah, S & Kim, D 2021, Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method. in B Bodermann & K Frenner (eds), Modeling Aspects in Optical Metrology VIII., 117830N, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11783, SPIE, Modeling Aspects in Optical Metrology VIII 2021, Virtual, Online, Germany, 21.06.21. https://doi.org/10.1117/12.2592650

Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method. / Dembele, Vamara; Choi, Inho; Kheiryzadehkhanghah, Saeid et al.
Modeling Aspects in Optical Metrology VIII. ed. / Bernd Bodermann; Karsten Frenner. SPIE, 2021. 117830N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11783).

Research output: Contribution to conference › Conference paper › peer-review

TY - GEN

T1 - Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

AU - Dembele, Vamara

AU - Choi, Inho

AU - Kheiryzadehkhanghah, Saeid

AU - Kim, Daesuk

PY - 2021

Y1 - 2021

N2 - We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO2 thin film with a nominal thickness of 500 nm deposited on a Si bare wafer.

AB - We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO2 thin film with a nominal thickness of 500 nm deposited on a Si bare wafer.

KW - Ellipsometry

KW - Interferometry

KW - Phase measurement

KW - Polarization measurement

UR - https://www.scopus.com/pages/publications/85109631125

U2 - 10.1117/12.2592650

DO - 10.1117/12.2592650

M3 - Conference paper

AN - SCOPUS:85109631125

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Modeling Aspects in Optical Metrology VIII

A2 - Bodermann, Bernd

A2 - Frenner, Karsten

PB - SPIE

T2 - Modeling Aspects in Optical Metrology VIII 2021

Y2 - 21 June 2021 through 25 June 2021

ER -

Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Abstract

Publication series

Conference

Keywords

Quacquarelli Symonds(QS) Subject Topics

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