Steam treated ordered mesoporous carbon nanomaterials for catalytic conversion of silicon tetrachloride to trichlorosilane

The steam-pretreatment on ordered-mesoporous carbon (OMC) catalysts was conducted to improve the catalytic properties for silicon tetrachloride (STC) to trichlorosilane (TCS) conversion. The surface area, pore size and pore volume of OMC were significantly changed as a function of pretreatment temperature. The steam-pretreated OMC at 500 °C exhibited the high surface area (~1476.4 m²/g) and pore volume (1.89 cm³/g), which leads the highest conversion rate of 10.8% as compared to bare-OMC (4.3%) and the steam-pretreated OMC. The steam-pretreatment on OMC might increase active oxygenated species, which promoted the generation of active sites of C-O-Sifor high conversion of STC to TCS.