Strong light-extraction enhancement in GaInN light-emitting diodes patterned with TiO 2 micro-pillars with tapered sidewalls

Ming Ma; Jaehee Cho; E. Fred Schubert; Yongjo Park; Gi Bum Kim; Cheolsoo Sone

doi:10.1063/1.4756797

Strong light-extraction enhancement in GaInN light-emitting diodes patterned with TiO ₂ micro-pillars with tapered sidewalls

Ming Ma^*
, Jaehee Cho
, E. Fred Schubert
, Yongjo Park
, Gi Bum Kim
, Cheolsoo Sone

^*Corresponding author for this work

Department of Semiconductor Science and Technology

Rensselaer Polytechnic Institute
Samsung

Research output: Contribution to journal › Journal article › peer-review

22 Scopus citations

Abstract

An effective method to enhance the light extraction for GaInN light-emitting diodes (LEDs) is reported. The method employs TiO ₂ micro-pillars with tapered sidewalls, which are refractive-index-matched to the underlying GaN. The tapered micro-pillars are fabricated by using reflowed photoresist as mask during CHF ₃-based dry etch, with O ₂ added in order to precisely control the taper angle. LEDs patterned with TiO ₂ micro-pillars with tapered sidewalls show a 100 enhancement in light-output power over planar reference LEDs. The measured results are in good agreement with ray-tracing simulations, showing strong potential of optical surfaces that are controlled in terms of refractive index and lateral structure.

Original language	English
Article number	141105
Journal	Applied Physics Letters
Volume	101
Issue number	14
DOIs	https://doi.org/10.1063/1.4756797
State	Published - 2012.10.1

Access to Document

10.1063/1.4756797

Cite this

@article{3372e281986449b9b3fa42c1f2aba512,

title = "Strong light-extraction enhancement in GaInN light-emitting diodes patterned with TiO 2 micro-pillars with tapered sidewalls",

abstract = "An effective method to enhance the light extraction for GaInN light-emitting diodes (LEDs) is reported. The method employs TiO 2 micro-pillars with tapered sidewalls, which are refractive-index-matched to the underlying GaN. The tapered micro-pillars are fabricated by using reflowed photoresist as mask during CHF 3-based dry etch, with O 2 added in order to precisely control the taper angle. LEDs patterned with TiO 2 micro-pillars with tapered sidewalls show a 100 enhancement in light-output power over planar reference LEDs. The measured results are in good agreement with ray-tracing simulations, showing strong potential of optical surfaces that are controlled in terms of refractive index and lateral structure.",

author = "Ming Ma and Jaehee Cho and \{Fred Schubert\}, E. and Yongjo Park and \{Bum Kim\}, Gi and Cheolsoo Sone",

year = "2012",

month = oct,

day = "1",

doi = "10.1063/1.4756797",

language = "English",

volume = "101",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "14",

}

TY - JOUR

T1 - Strong light-extraction enhancement in GaInN light-emitting diodes patterned with TiO 2 micro-pillars with tapered sidewalls

AU - Ma, Ming

AU - Cho, Jaehee

AU - Fred Schubert, E.

AU - Park, Yongjo

AU - Bum Kim, Gi

AU - Sone, Cheolsoo

PY - 2012/10/1

Y1 - 2012/10/1

N2 - An effective method to enhance the light extraction for GaInN light-emitting diodes (LEDs) is reported. The method employs TiO 2 micro-pillars with tapered sidewalls, which are refractive-index-matched to the underlying GaN. The tapered micro-pillars are fabricated by using reflowed photoresist as mask during CHF 3-based dry etch, with O 2 added in order to precisely control the taper angle. LEDs patterned with TiO 2 micro-pillars with tapered sidewalls show a 100 enhancement in light-output power over planar reference LEDs. The measured results are in good agreement with ray-tracing simulations, showing strong potential of optical surfaces that are controlled in terms of refractive index and lateral structure.

AB - An effective method to enhance the light extraction for GaInN light-emitting diodes (LEDs) is reported. The method employs TiO 2 micro-pillars with tapered sidewalls, which are refractive-index-matched to the underlying GaN. The tapered micro-pillars are fabricated by using reflowed photoresist as mask during CHF 3-based dry etch, with O 2 added in order to precisely control the taper angle. LEDs patterned with TiO 2 micro-pillars with tapered sidewalls show a 100 enhancement in light-output power over planar reference LEDs. The measured results are in good agreement with ray-tracing simulations, showing strong potential of optical surfaces that are controlled in terms of refractive index and lateral structure.

UR - https://www.scopus.com/pages/publications/84867552691

U2 - 10.1063/1.4756797

DO - 10.1063/1.4756797

M3 - Journal article

AN - SCOPUS:84867552691

SN - 0003-6951

VL - 101

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

M1 - 141105

ER -

Strong light-extraction enhancement in GaInN light-emitting diodes patterned with TiO ₂ micro-pillars with tapered sidewalls

Abstract

Access to Document

Other files and links

Fingerprint

Cite this