Study of an Atmospheric-Pressure Dielectric Barrier Discharge Developed for Large Area Material Processing

An atmospheric-pressure dielectric barrier discharge plasma source was developed aiming for large-area surface treatment of various materials, The plasma is generated using a 13.56 MHz RF source and its dimension is approximately 200 mm × 20 mm. In order to enhance the processing efficiency, double structure electrodes and dielectricws ere constructed. Using electrical and optical methods, important plasma parameters were measured along the length direction of the plasma. The measured rotational temperature is (490 - 570) K and electron density is (5.4×10¹⁴ - 6.2×10 ¹⁴) cm^-3 in the input power range of 300 W to 500 W. The emission intensity measurement showed a uniformity of > 70% along the length direction of the plasma. Through the contact-angle measurement, the capability of surface treatment was checked.