Skip to main navigation Skip to search Skip to main content

Surface-Functionalized Hafnia with Bespoke Ferroelectric Properties for Memory and Logic Applications

  • D. H. Choe*
  • , H. Bae
  • , H. Lee
  • , Y. Lee
  • , T. Moon
  • , S. G. Nam
  • , S. Jo
  • , H. J. Lee
  • , E. Lee
  • , J. Heo
  • *Corresponding author for this work
  • Samsung

Research output: Contribution to conferenceConference paperpeer-review

Abstract

In this work, we, for the first time, provide an atomic-level understanding of the surface functionality of ferroelectric (FE) hafnia in relation to their FE properties from thorough first-principles calculations. We devise a new algorithm that automatically finds the stable geometries of various functionalized surfaces of FE hafnia, which overcomes the previous challenges in modelling the formidably complicated bonding chemistry between Hf, O, H atoms and other functional groups at the surfaces. Using our method, we demonstrate that preferred crystallographic orientations in thin film hafnia can be extensively engineered by a combination of hydroxyl (-OH) and fluorine (-F) functionalization at the surface. This enables the control of remnant polarization (Pr) as well as coercive field (Ec) of FE hafnia for targeted applications, where, for instance, Pr can be tuned from zero (in-plane polarization) to the theoretical maximum limit (Pr = 52 µC/cm2). Our results not only explain the recent observations of an enhanced Pr in highly-Textured ultrathin hafnia, but also provide practical guidelines for the design and fabrication of FE hafnia-based advanced memory and logic devices.

Original languageEnglish
Title of host publication2021 IEEE International Electron Devices Meeting, IEDM 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages15.1.1-15.1.4
ISBN (Electronic)9781665425728
DOIs
StatePublished - 2021
Event2021 IEEE International Electron Devices Meeting, IEDM 2021 - San Francisco, United States
Duration: 2021.12.112021.12.16

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2021-December
ISSN (Print)0163-1918

Conference

Conference2021 IEEE International Electron Devices Meeting, IEDM 2021
Country/TerritoryUnited States
CitySan Francisco
Period21.12.1121.12.16

Fingerprint

Dive into the research topics of 'Surface-Functionalized Hafnia with Bespoke Ferroelectric Properties for Memory and Logic Applications'. Together they form a unique fingerprint.

Cite this