TY - GEN
T1 - Surface-Functionalized Hafnia with Bespoke Ferroelectric Properties for Memory and Logic Applications
AU - Choe, D. H.
AU - Bae, H.
AU - Lee, H.
AU - Lee, Y.
AU - Moon, T.
AU - Nam, S. G.
AU - Jo, S.
AU - Lee, H. J.
AU - Lee, E.
AU - Heo, J.
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021
Y1 - 2021
N2 - In this work, we, for the first time, provide an atomic-level understanding of the surface functionality of ferroelectric (FE) hafnia in relation to their FE properties from thorough first-principles calculations. We devise a new algorithm that automatically finds the stable geometries of various functionalized surfaces of FE hafnia, which overcomes the previous challenges in modelling the formidably complicated bonding chemistry between Hf, O, H atoms and other functional groups at the surfaces. Using our method, we demonstrate that preferred crystallographic orientations in thin film hafnia can be extensively engineered by a combination of hydroxyl (-OH) and fluorine (-F) functionalization at the surface. This enables the control of remnant polarization (Pr) as well as coercive field (Ec) of FE hafnia for targeted applications, where, for instance, Pr can be tuned from zero (in-plane polarization) to the theoretical maximum limit (Pr = 52 µC/cm2). Our results not only explain the recent observations of an enhanced Pr in highly-Textured ultrathin hafnia, but also provide practical guidelines for the design and fabrication of FE hafnia-based advanced memory and logic devices.
AB - In this work, we, for the first time, provide an atomic-level understanding of the surface functionality of ferroelectric (FE) hafnia in relation to their FE properties from thorough first-principles calculations. We devise a new algorithm that automatically finds the stable geometries of various functionalized surfaces of FE hafnia, which overcomes the previous challenges in modelling the formidably complicated bonding chemistry between Hf, O, H atoms and other functional groups at the surfaces. Using our method, we demonstrate that preferred crystallographic orientations in thin film hafnia can be extensively engineered by a combination of hydroxyl (-OH) and fluorine (-F) functionalization at the surface. This enables the control of remnant polarization (Pr) as well as coercive field (Ec) of FE hafnia for targeted applications, where, for instance, Pr can be tuned from zero (in-plane polarization) to the theoretical maximum limit (Pr = 52 µC/cm2). Our results not only explain the recent observations of an enhanced Pr in highly-Textured ultrathin hafnia, but also provide practical guidelines for the design and fabrication of FE hafnia-based advanced memory and logic devices.
UR - https://www.scopus.com/pages/publications/85126986613
U2 - 10.1109/IEDM19574.2021.9720518
DO - 10.1109/IEDM19574.2021.9720518
M3 - Conference paper
AN - SCOPUS:85126986613
T3 - Technical Digest - International Electron Devices Meeting, IEDM
SP - 15.1.1-15.1.4
BT - 2021 IEEE International Electron Devices Meeting, IEDM 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2021 IEEE International Electron Devices Meeting, IEDM 2021
Y2 - 11 December 2021 through 16 December 2021
ER -