Abstract
A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.
| Original language | English |
|---|---|
| Pages (from-to) | 1-6 |
| Number of pages | 6 |
| Journal | Optics Communications |
| Volume | 168 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1999.09.1 |
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